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Robert J. O'Donnell

Lam Research

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Publication

Featured researches published by Robert J. O'Donnell.

Archive | 2004

Apparatus and method for utilizing a meniscus in substrate processing

Robert J. O'Donnell

Archive | 2004

Concentric proximity processing head

Michael G. R. Smith; Michael Ravkin; Robert J. O'Donnell

Archive | 2004

Phobic barrier meniscus separation and containment

Robert J. O'Donnell; Thomas W. Anderson

Archive | 2004

Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor

Robert J. O'Donnell; John Daugherty

Archive | 2000

Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof

Robert J. O'Donnell; John Daugherty; Christopher C. Chang

Archive | 2000

Diamond coatings on reactor wall and method of manufacturing thereof

Robert J. O'Donnell; John Daugherty; Christopher C. Chang

Archive | 2009

Low contamination components for semiconductor processing apparatus and methods for making components

Robert J. O'Donnell

Archive | 2003

Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof

Robert J. O'Donnell; Christopher C. Chang; John Daugherty

Archive | 2003

Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof

Robert J. O'Donnell; John Daugherty; Christopher C. Chang

Archive | 2001

Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof

Robert J. O'Donnell; John Daugherty

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John Daugherty

Lam Research

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Christopher C. Chang

Lam Research

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Thomas W. Anderson

Lam Research

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Arnold Kholodenko

Lam Research

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Michael G. R. Smith

Lam Research

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Michael Ravkin

Lam Research

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Mike Ravkin

Lam Research

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Alexander A. Yatskar

Lam Research

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Eric Lenz

Lam Research

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Gregory J. Goldspring

Lam Research

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