Michael Ravkin
Lam Research
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Publication
Featured researches published by Michael Ravkin.
machine vision applications | 2002
Vladislav V. Yakovlev; Katerina Mikhailchenko; Michael Ravkin
We propose and experimentally demonstrate a fluorescent imaging technique for surface quality control of wet-cleaned silicon wafers. This simple technique allows macro- and microscopic imaging. Submicron resolution and fast scanning are successfully demonstrated. Distribution of water stains is measured using this novel technique and correlated to the surface structure.
Archive | 2004
Michael G. R. Smith; Michael Ravkin; Robert J. O'Donnell
Archive | 2004
David Hemker; Fred C. Redeker; John M. Boyd; John M. de Larios; Michael Ravkin; Mikhail Korolik
Archive | 2004
Michael Ravkin; Michael G. R. Smith; John M. de Larios; Fritz C. Redeker; Mikhail Korolik; Christian DiPietro
Archive | 2003
James P. Garcia; John M. de Larios; Michael Ravkin; Fred C. Redeker; Carl Woods
Archive | 2004
John M. Boyd; John M. de Larios; Michael Ravkin; Fred C. Redeker
Archive | 2000
Michael Ravkin
Archive | 2002
Katrina Mikhaylichenko; Michael Ravkin
Archive | 2002
Katrina A. Mikhaylich; Michael Ravkin
Archive | 2002
Michael Ravkin; Katrina Mikhaylichenko; John M. Delarios
