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Arnold Kholodenko

Lam Research

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Publication

Featured researches published by Arnold Kholodenko.

Archive | 2005

Apparatus for an optimized plasma chamber grounded electrode assembly

Arnold Kholodenko; Anwar Husain

Archive | 2010

PLASMA PROCESSING CHAMBER WITH A GROUNDED ELECTRODE ASSEMBLY

Arnold Kholodenko; Anwer Husain

Archive | 2009

Generator for foam to clean substrate

Arnold Kholodenko; Anwar Husain; Gregory A. Tomasch; Cheng-Yu (Sean) Lin

Archive | 2012

Multi-stage substrate cleaning method and apparatus

Arnold Kholodenko; Katrina Mikhaylichenko; Cheng-Yu (Sean) Lin; Mark Wilcoxson; Leon Ginzburg; Mark Kawaguchi

Archive | 2007

High power electrical connector for a laminated heater

Arnold Kholodenko; Russell Martin; John Rasnick; Christopher Kimball

Archive | 2007

System, method and apparatus for maintaining separation of liquids in a controlled meniscus

Robert J. O'Donnell; Cheng-Yu (Sean) Lin; Arnold Kholodenko

Archive | 2010

Wafer carrier drive apparatus and method for operating the same

Arnold Kholodenko; Anwar Husain; George Khait

Archive | 2008

METHODS OF CONFIGURING A PROXIMITY HEAD THAT PROVIDES UNIFORM FLUID FLOW RELATIVE TO A WAFER

Arnold Kholodenko; Cheng-Yu (Sean) Lin

Archive | 2007

Chemical resistant semiconductor processing chamber bodies

Arnold Kholodenko; Mark Mandelboym; Grant Peng; Katrina Mikhaylichenko; Wing Lau Cheng

Archive | 2009

APPARATUS FOR SUBSTANTIALLY UNIFORM FLUID FLOW RATES RELATIVE TO A PROXIMITY HEAD IN PROCESSING OF A WAFER SURFACE BY A MENISCUS

Arnold Kholodenko; Cheng-Yu (Sean) Lin; Russell Martin

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Collaboration

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Cheng-Yu (Sean) Lin

Lam Research

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Anwar Husain

Lam Research

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Gregory A. Tomasch

Lam Research

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Leon Ginzburg

Lam Research

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Mark Mandelboym

Lam Research

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Russell Martin

Lam Research

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Katrina Mikhaylichenko

Lam Research

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Robert J. O'Donnell

Lam Research

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Wing Lau Cheng

Lam Research

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Christopher Kimball

Lam Research

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