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Michael G. R. Smith

Lam Research

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Publication

Featured researches published by Michael G. R. Smith.

Archive | 2004

Concentric proximity processing head

Michael G. R. Smith; Michael Ravkin; Robert J. O'Donnell

Archive | 2004

Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer

Michael Ravkin; Michael G. R. Smith; John M. de Larios; Fritz C. Redeker; Mikhail Korolik; Christian DiPietro

Archive | 2004

Proximity meniscus manifold

Carl Woods; Michael G. R. Smith; John Parks; James P. Garcia; John M. de Larios

Archive | 2001

Temperature control system for plasma processing apparatus

Andrew D. Bailey; Alan M. Schoepp; Michael G. R. Smith; Andras Kuthi

Archive | 2005

Substrate proximity processing structures and methods for using and making the same

Carl Woods; Michael G. R. Smith; John Parks

Archive | 2003

Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency

John M. Boyd; Andras Kuthi; Michael G. R. Smith; Thomas W. Anderson; William Thie

Archive | 2004

Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same

Michael Raykin; John M. de Larios; Mikhail Korolik; Michael G. R. Smith; Carl Woods

Archive | 2008

Methods for Processing Wafer Surfaces Using Thin, High Velocity Fluid Layer

Michael Ravkin; Michael G. R. Smith; John M. de Larios; Fritz C. Redeker; Mikhail Korolik; Christian DiPietro

Archive | 2005

Substrate proximity processing structure and usage thereof, and manufacturing method therefor

John Parks; Michael G. R. Smith; Carl Woods; カール・ウッズ; ジョン・パークス; マイケル・ジー．アール．・スミス

Archive | 2007

Substrate proximity processing structures

Carl Woods; Michael G. R. Smith; John Parks

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Carl Woods

Lam Research

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John Parks

Lam Research

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Michael Ravkin

Lam Research

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Mikhail Korolik

Lam Research

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Larios John M. De

Lam Research

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Andras Kuthi

Lam Research

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John M. de Larios

Lam Research

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Alan M. Schoepp

Lam Research

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Christian DiPietro

Lam Research

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Fritz C. Redeker

Lam Research

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