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Dive into the research topics where Mike Ravkin is active.

Publication


Featured researches published by Mike Ravkin.


Archive | 2000

Capillary proximity heads for single wafer cleaning and drying

John M. de Larios; Mike Ravkin; Glen Travis; Jim Keller; Wilbur C. Krusell


Archive | 2002

Methods for wafer proximity cleaning and drying

John M. de Larios; Mike Ravkin; Glen Travis; Jim Keller; Wilbur C. Krusell


Archive | 2003

Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces

John M. de Larios; Mike Ravkin; Carl Woods; Fritz C. Redeker; James P. Garcia


Archive | 2003

Apparatus and method for depositing and planarizing thin films of semiconductor wafers

Mike Ravkin; John M. Boyd; Yezdi Dordi; Fred C. Redeker; John M. de Larios


Archive | 2003

Method and apparatus for cleaning a substrate using megasonic power

John M. Boyd; Mike Ravkin; Fred C. Redeker; John M. de Larios


Archive | 2000

Single wafer residue, thin film removal and clean

Wilbur C. Krusell; John M. de Larios; Mike Ravkin


Archive | 2003

Vertical proximity processor

James P. Garcia; Mike Ravkin; Carl Woods; Fred C. Redeker; John M. de Larios


Archive | 2000

Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process

Mike Ravkin; Katrina A. Mikhaylich; Don E. Anderson


Archive | 2002

Apparatus and method for qualifying a chemical mechanical planarization process

John M. Boyd; Katrina A. Mikhaylich; Mike Ravkin


Archive | 2001

Wafer scrubbing brush core

Tanlin Dickey; Julia S. Svirchevski; Don E. Anderson; Mike Ravkin; Helmuth W. Treichel; Roy Winston Pascal; Douglas S. Gardner

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