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Rod Kistler

Lam Research

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Publication

Featured researches published by Rod Kistler.

Archive | 2001

System and method for controlled polishing and planarization of semiconductor wafers

Rod Kistler; Yehiel Gotkis

Archive | 2001

System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques

John M. Boyd; Yehiel Gotkis; Rod Kistler

Archive | 2000

Pressurized membrane platen design for improving performance in CMP applications

Rod Kistler; John M. Boyd; Alek Owczarz

Archive | 2001

Apparatus for removal/remaining thickness profile manipulation

David Wei; Yehiel Gotkis; Aleksander Owczarz; John M. Boyd; Rod Kistler

Archive | 2000

Platen design for improving edge performance in CMP applications

Alek Owczarz; John M. Boyd; Rod Kistler

Archive | 2000

Piezoelectric platen design for improving performance in CMP applications

Rod Kistler; John M. Boyd; Alek Owczarz

Archive | 2004

Methods using active retainer rings for improving edge performance in CMP applications

Alek Owczarz; John M. Boyd; Rod Kistler

Archive | 2001

Polishing platen with pressurized membrane

John M. Boyd; Rod Kistler; Alek Owczarz

Archive | 2004

Method for chemical mechanical planarization

Yehiel Gotkis; Aleksandar Owczarz; Rod Kistler

Archive | 2001

Method and apparatus for chemical mechanical planarization

Yehiel Gotkis; Aleksandar Owczarz; Rod Kistler

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John M. Boyd

Lam Research

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Alek Owczarz

Lam Research

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Yehiel Gotkis

Lam Research

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Aleksandar Owczarz

Lam Research

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Aleksander Owczarz

Lam Research

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David Wei

Lam Research

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