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John M. Boyd

Lam Research

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Publication

Featured researches published by John M. Boyd.

Archive | 2004

Apparatus and method for providing a confined liquid for immersion lithography

David Hemker; Fred C. Redeker; John M. Boyd; John M. de Larios; Michael Ravkin; Mikhail Korolik

Archive | 2005

Method and apparatus for conditioning a polishing pad

John M. Boyd

Archive | 2000

Optical view port for chemical mechanical planarization endpoint detection

Randolph E. Treur; John M. Boyd; Stephan H. Wolf

Archive | 2003

Apparatus and method for depositing and planarizing thin films of semiconductor wafers

Mike Ravkin; John M. Boyd; Yezdi Dordi; Fred C. Redeker; John M. de Larios

Archive | 2003

Method and apparatus for cleaning a substrate using megasonic power

John M. Boyd; Mike Ravkin; Fred C. Redeker; John M. de Larios

Archive | 2003

Proximity brush unit apparatus and method

John M. Boyd; Michael L. Orbock; Fred C. Redeker

Archive | 2003

Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection

John M. Boyd; Michael S. Lacy

Archive | 2004

System and method for integrating in-situ metrology within a wafer process

John M. Boyd; John M. de Larios; Michael Ravkin; Fred C. Redeker

Archive | 2000

Field controlled polishing apparatus and method

Robert G. Boehm; John M. Boyd

Archive | 2006

Processes and Systems for Engineering a Barrier Surface for Copper Deposition

Yezdi Dordi; John M. Boyd; Tiruchirapalli Arunagiri; Hyungsuk Alexander Yoon; Fritz C. Redeker; William Thie; Arthur M. Howald

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Yezdi Dordi

Lam Research

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Fritz C. Redeker

Lam Research

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Fred C. Redeker

Lam Research

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William Thie

Lam Research

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Hyungsuk Alexander Yoon

Lam Research

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Michael Ravkin

Lam Research

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Larios John M. De

Lam Research

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Tiruchirapalli Arunagiri

Lam Research

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Mikhail Korolik

Lam Research

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Rod Kistler

Lam Research

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