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Sang Ki Nam

Lam Research

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Publication

Featured researches published by Sang Ki Nam.

Archive | 2012

SHOWERHEAD ELECTRODE ASSEMBLY IN A CAPACITIVELY COUPLED PLASMA PROCESSING APPARATUS

Sang Ki Nam; Rajinder Dhindsa; Ryan Bise

Archive | 2015

Ion to neutral control for wafer processing with dual plasma source reactor

Rajinder Dhindsa; Sang Ki Nam; Alexei Marakhtanov; Eric Hudson

Archive | 2012

PERIPHERAL RF FEED AND SYMMETRIC RF RETURN WITH RF STRAP INPUT

Sang Ki Nam; Rajinder Dhindsa; Alexei Marakhtanov

Archive | 2012

Peripheral RF Feed and Symmetric RF Return for Symmetric RF Delivery

Sang Ki Nam; Rajinder Dhindsa; James Rogers

Archive | 2012

Methods and apparatus for selectively modulating azimuthal non-uniformity in a plasma processing system

Sang Ki Nam; Rajinder Dhindsa; Alexei Marakhtanov

Archive | 2012

METHODS AND APPARATUS FOR CORRECTING FOR NON-UNIFORMITY IN A PLASMA PROCESSING SYSTEM

Sang Ki Nam; Rajinder Dhindsa

Archive | 2012

Chuck assembly for plasma processing

Sang Ki Nam; Rajinder Dhindsa; Alexei Marakhtanov

Archive | 2012

Methods and apparatus for selectively modifying rf current paths in a plasma processing system

Sang Ki Nam; Rajinder Dhindsa; Alexei Marakhtanov

Archive | 2014

Methods for Selectively Modifying RF Current Paths in a Plasma Processing System

Sang Ki Nam; Rajinder Dhindsa; Alexei Marakhtanov

Archive | 2012

Dual zone temperature control of upper electrodes

Alexei Marakhtanov; Rajinder Dhindsa; Ryan Bise; Lumin Li; Sang Ki Nam; James Rogers; Eric Hudson; Gerardo Delgadino; Andrew D. Bailey; Mike Kellogg; Anthony de la Llera

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Collaboration

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Rajinder Dhindsa

Lam Research

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Alexei Marakhtanov

Lam Research

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Ryan Bise

Lam Research

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Eric Hudson

Lam Research

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James Rogers

Lam Research

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Andrew D. Bailey

Lam Research

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Gerardo Delgadino

Lam Research

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Lumin Li

Lam Research

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Mike Kellogg

Lam Research

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Anthony de la Llera

Lam Research

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