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Schuster Karl-Heinz

Carl Zeiss AG

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Publication

Featured researches published by Schuster Karl-Heinz.

Archive | 2001

Optical system for projection exposure device, includes optical element which consists of magnesium fluoride, as main constituent

Schuster Karl-Heinz

Archive | 1999

Optisches System mit Polarisationskompensator

Fuerter Gerhard; Wagner Christian; Schuster Karl-Heinz; Kaiser Winfried; Gerhard Michael

Archive | 2000

Projection lens has system filter screen, constrictions and bulges, negative lens, and positive lenses

Schuster Karl-Heinz

Archive | 1999

Mikrolithographisches Reduktionsobjektiv, Projektionsbelichtungsanlage und -Verfahren

Schuster Karl-Heinz; Beierl Helmut

Archive | 2001

Optical arrangement has optical element, projection light source and compensation light feed device coupled to optical element via peripheral surface of optical element

Schuster Karl-Heinz; Holderer Hubert; Buenau Rudolf; Wagner Christian; Becker Jochen; Xalter Stefan

Archive | 2001

Polarisator und Mikrolithographie-Projektionsanlage mit Polarisator

Schuster Karl-Heinz

Archive | 2005

Mikroskopisches Abbildungssystem und Verfahren zur Emulation eines hochaperturigen Abbildungssystems, insbesondere zur Maskeninspektion

Harnisch Wolfgang; Schuster Karl-Heinz; Scheruebl Thomas; Greif-Wuestenbecker Joern; Rosenkranz Norbert; Totzeck Michael; Stroessner Ulrich; Feldmann Heiko; Gruner Toralf

Archive | 2000

Optische Abbildungsvorrichtung, insbesondere Objektiv mit wenigstens einer Systemblende

Schuster Karl-Heinz; Bischoff Thomas; Gellrich Bernhard; Muehlbeyer Michael; Maul Guenter

Archive | 2008

Microlithographic projection exposure system has double-refractive delay system with time-delay element, which has component is made of optically positive uniaxial crystal material with optical crystal axis

Schuster Karl-Heinz

Archive | 2007

Interferometer apparatus and method of processing a substrate having an optical surface

Schuster Karl-Heinz

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Collaboration

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Beierl Helmut

Carl Zeiss AG

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Gruner Toralf

Carl Zeiss AG

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Totzeck Michael

Carl Zeiss AG

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Bischoff Thomas

Carl Zeiss AG

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Epple Alexander

Carl Zeiss AG

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Feldmann Heiko

Carl Zeiss AG

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Gellrich Bernhard

Carl Zeiss AG

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Greif-Wuestenbecker Joern

Carl Zeiss AG

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Harnisch Wolfgang

Carl Zeiss AG

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Maul Guenter

Carl Zeiss AG

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