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Shambhu N. Roy

Applied Materials

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Publication

Featured researches published by Shambhu N. Roy.

Archive | 2009

Electrostatic chuck assembly

Steven V. Sansoni; Cheng-Hsiung Tsai; Shambhu N. Roy; Karl M. Brown; Vijay D. Parkhe; Hari Ponnekanti

Archive | 2016

High temperature chuck for plasma processing systems

Toan Q. Tran; Sultan Malik; Dmitry Lubomirsky; Shambhu N. Roy; Satoru Kobayashi; Tae Seung Cho; Soonam Park; Shankar Venkataraman

Archive | 2011

ELECTROSTATIC CHUCK AND METHODS OF USE THEREOF

Shambhu N. Roy; Martin Lee Riker; Keith A. Miller; Vijay D. Parkhe; Steven V. Sansoni

Archive | 2010

In situ plasma clean for removal of residue from pedestal surface without breaking vacuum

Richard J. Green; Cheng-Hsiung Tsai; Shambhu N. Roy; Puneet Bajaj; David Loo

Archive | 2010

BIASABLE COOLING PEDESTAL

Shambhu N. Roy

Archive | 2016

Apparatus and methods for spacer deposition and selective removal in an advanced patterning process

Jie Zhou; Chentsau Ying; Shambhu N. Roy; Srinivas D. Nemani; Jingjing Liu; Ellie Yieh

Archive | 2014

Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition

Jun Xue; Jingjing Liu; Yongmei Chen; Ludovic Godet; Chentsau Ying; Shambhu N. Roy

Archive | 2018

PLAQUETTE TRAITÉE EN TANT QUE PLAQUE SUPÉRIEURE D'UN SUPPORT DE PIÈCE DANS UN TRAITEMENT MÉCANIQUE ET DE SEMI-CONDUCTEURS

Srinivas D. Nemani; Shambhu N. Roy; Gautam Pisharody; Douglas A. Buchberger; Ellie Yieh; Zhong Qiang Hua

Archive | 2016

Appareils et procédés de dépôt et d'élimination sélective de couche d'espacement dans un processus de formation de motifs avancé

Jie Zhou; Chentsau Ying; Shambhu N. Roy; Srinivas D. Nemani; Jingjing Liu; Ellie Yieh

Archive | 2009

Ensemble mandrin électrostatique

Steven V. Sansoni; Cheng-Hsiung Tsai; Shambhu N. Roy; Karl M. Brown; Vijay D. Parkhe; Hari Ponnekanti

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Cheng-Hsiung Tsai

Applied Materials

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Chentsau Ying

Applied Materials

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Ellie Yieh

Applied Materials

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Jingjing Liu

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Steven V. Sansoni

Applied Materials

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Vijay D. Parkhe

Applied Materials

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Hari Ponnekanti

Applied Materials

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Jie Zhou

Applied Materials

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Karl M. Brown

Applied Materials

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