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Dive into the research topics where Steven V. Sansoni is active.

Publication


Featured researches published by Steven V. Sansoni.


Archive | 2009

Electrostatic chuck assembly

Steven V. Sansoni; Cheng-Hsiung Tsai; Shambhu N. Roy; Karl M. Brown; Vijay D. Parkhe; Hari Ponnekanti


Archive | 1999

Method and apparatus for reducing thermal gradients within a substrate support

Vincent E. Burkhart; Steven V. Sansoni; Michael Sugarman; Anthony Chan


Archive | 2006

Ring assembly for substrate processing chamber

Jennifer Watia Tiller; Allen Lau; Marc O. Schweitzer; Steven V. Sansoni; Keith A. Miller; Christopher Boitnott


Archive | 2014

SUBSTRATE SUPPORT APPARATUS HAVING REDUCED SUBSTRATE PARTICLE GENERATION

Pulkit Agarwal; Song-Moon Suh; Glen T. Mori; Steven V. Sansoni


Archive | 2014

COMPLIANT ROBOT BLADE FOR DEFECT REDUCTION

Steven V. Sansoni; Jeffrey A. Brodine; Glen T. Mori


Archive | 2006

Detachable electrostatic chuck having sealing assembly

Vijay D. Parkhe; Cheng-Tsiung Tsai; Steven V. Sansoni


Archive | 1998

Method and apparatus for predicting failure of an eletrostatic chuck

Vijay D. Parkhe; Steven V. Sansoni; Vincent E. Burkhart


Archive | 2007

Deposition analysis for robot motion correction

Todd W. Martin; Steven V. Sansoni; Michael R. Rice; Eric Ng; Jeffrey C. Hudgens; Frederick Guckel; Russell Kaplan


Archive | 2012

Electrostatic chuck with temperature control

Vijay D. Parkhe; Steven V. Sansoni; Cheng-Hsiung Matthew Tsai


Archive | 2011

ELECTROSTATIC CHUCK AND METHODS OF USE THEREOF

Shambhu N. Roy; Martin Lee Riker; Keith A. Miller; Vijay D. Parkhe; Steven V. Sansoni

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