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Steven V. Sansoni

Applied Materials

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Publication

Featured researches published by Steven V. Sansoni.

Archive | 2009

Electrostatic chuck assembly

Steven V. Sansoni; Cheng-Hsiung Tsai; Shambhu N. Roy; Karl M. Brown; Vijay D. Parkhe; Hari Ponnekanti

Archive | 1999

Method and apparatus for reducing thermal gradients within a substrate support

Vincent E. Burkhart; Steven V. Sansoni; Michael Sugarman; Anthony Chan

Archive | 2006

Ring assembly for substrate processing chamber

Jennifer Watia Tiller; Allen Lau; Marc O. Schweitzer; Steven V. Sansoni; Keith A. Miller; Christopher Boitnott

Archive | 2014

SUBSTRATE SUPPORT APPARATUS HAVING REDUCED SUBSTRATE PARTICLE GENERATION

Pulkit Agarwal; Song-Moon Suh; Glen T. Mori; Steven V. Sansoni

Archive | 2014

COMPLIANT ROBOT BLADE FOR DEFECT REDUCTION

Steven V. Sansoni; Jeffrey A. Brodine; Glen T. Mori

Archive | 2006

Detachable electrostatic chuck having sealing assembly

Vijay D. Parkhe; Cheng-Tsiung Tsai; Steven V. Sansoni

Archive | 1998

Method and apparatus for predicting failure of an eletrostatic chuck

Vijay D. Parkhe; Steven V. Sansoni; Vincent E. Burkhart

Archive | 2007

Deposition analysis for robot motion correction

Todd W. Martin; Steven V. Sansoni; Michael R. Rice; Eric Ng; Jeffrey C. Hudgens; Frederick Guckel; Russell Kaplan

Archive | 2012

Electrostatic chuck with temperature control

Vijay D. Parkhe; Steven V. Sansoni; Cheng-Hsiung Matthew Tsai

Archive | 2011

ELECTROSTATIC CHUCK AND METHODS OF USE THEREOF

Shambhu N. Roy; Martin Lee Riker; Keith A. Miller; Vijay D. Parkhe; Steven V. Sansoni

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Collaboration

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Vijay D. Parkhe

Applied Materials

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Vincent E. Burkhart

Applied Materials

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Karl M. Brown

Applied Materials

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Glen T. Mori

Applied Materials

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Shambhu N. Roy

Applied Materials

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Allen Flanigan

Applied Materials

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Cheng-Hsiung Tsai

Applied Materials

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Hari Ponnekanti

Applied Materials

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Jeffrey A. Brodine

Applied Materials

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Jeffrey C. Hudgens

Applied Materials

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