Shrikant P. Lohokare

Methods and arrangement for the reduction of byproduct deposition in a plasma processing system

Method for adjusting voltage on a powered faraday shield

System, method and apparatus for improved global dual-damascene planarization

System, method and apparatus for self-cleaning dry etch

Accurate temperature measurement for semiconductor applications

System, method and apparatus for improved local dual-damascene planarization

System and method for surface reduction, passivation, corrosion prevention and activation of copper surface

Methods and systems for a stress-free cleaning a surface of a substrate

Method for stress free conductor removal

Procedes et dispositif pour reduire des depots de sous-produits dans un systeme de traitement plasma