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Shrikant P. Lohokare

Lam Research

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Publication

Featured researches published by Shrikant P. Lohokare.

Archive | 2004

Methods and arrangement for the reduction of byproduct deposition in a plasma processing system

Shrikant P. Lohokare; Andrew D. Bailey

Archive | 2005

Method for adjusting voltage on a powered faraday shield

Shrikant P. Lohokare; Andras Kuthi; Andrew D. Bailey

Archive | 2004

System, method and apparatus for improved global dual-damascene planarization

Shrikant P. Lohokare; Andrew D. Bailey; David Hemker; Joel M. Cook

Archive | 2004

System, method and apparatus for self-cleaning dry etch

Andrew D. Bailey; Shrikant P. Lohokare; Arthur M. Howald; Yunsang Kim

Archive | 2005

Accurate temperature measurement for semiconductor applications

Shrikant P. Lohokare

Archive | 2004

System, method and apparatus for improved local dual-damascene planarization

Shrikant P. Lohokare; Andrew D. Bailey; David Hemker; Joel M. Cook

Archive | 2004

System and method for surface reduction, passivation, corrosion prevention and activation of copper surface

Andrew D. Bailey; Shrikant P. Lohokare

Archive | 2004

Methods and systems for a stress-free cleaning a surface of a substrate

Andrew D. Bailey; Shrikant P. Lohokare; Yunsang Kim; Simon McClatchie

Archive | 2007

Method for stress free conductor removal

Andrew D. Bailey; Shrikant P. Lohokare

Archive | 2005

Procedes et dispositif pour reduire des depots de sous-produits dans un systeme de traitement plasma

Shrikant P. Lohokare; Andrew D. Bailey

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Collaboration

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Andrew D. Bailey

Lam Research

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David Hemker

Lam Research

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Joel M. Cook

Lam Research

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Yunsang Kim

Lam Research

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Arthur M. Howald

Lam Research

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Andras Kuthi

Lam Research

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Simon McClatchie

Lam Research

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