David Hemker
Lam Research
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Publication
Featured researches published by David Hemker.
international workshop on junction technology | 2012
Reza Arghavani; Shashank C. Deshmukh; David Hemker; Gowri Kamarthy; Jeffrey Marks; Vahid Vahedi
Today no insurmountable obstacles are foreseen inhibiting scaling logic devices to the 10nm node. Cost effective processes and equipment sets have been developed that allow both 3-D Tri-Gate and Ultra-Thin Body SOI integration schemes to be scaled. This allows the equipment industry to focus on innovations of new material and their integration into cost effective tool sets in time for high volume manufacturing in sub 10nm node technology. In this paper we review various process challenges the equipment industry overcame to enable the 3-D Tri-Gate and Ultra-Thin Body SOI architecture in partnership with integrated device manufactures.
Archive | 2004
David Hemker; Fred C. Redeker; John M. Boyd; John M. de Larios; Michael Ravkin; Mikhail Korolik
Archive | 1996
Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson; Andras Kuthi
Archive | 2002
Robert P. Chebi; David Hemker
Archive | 2000
Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson
Archive | 2000
Andrew D. Bailey; Alan M. Schoepp; David Hemker; Mark Wilcoxson
Archive | 2004
Tuqiang Ni; Wenli Collison; David Hemker; Lumin Li
Archive | 2003
Nicholas Bright; David Hemker
Archive | 2002
Aleksander Owczarz; Yehiel Gotkis; David Hemker; Rodney Kistler
Archive | 2000
Andrew D. Bailey; David Hemker
