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Stanislav S. Todorov

Varian Semiconductor

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Publication

Featured researches published by Stanislav S. Todorov.

Archive | 2012

Finfet Device Fabrication Using Thermal Implantation

Nilay Pradhan; Stanislav S. Todorov; Kurt Decker-Lucke; Klaus Petry; Benjamin Colombeau; Baonian Guo

Archive | 2011

Method to modify the shape of a cavity using angled implantation

Andrew M. Waite; Youn‐ki Kim; Stanislav S. Todorov

Archive | 2014

Apparatus and techniques for controlling ion implantation uniformity

Stanislav S. Todorov; George M. Gammel; Richard Allen Sprenkle; Norman E. Hussey; Frank Sinclair; Shengwu Chang; Joseph C. Olson; David Timberlake; Kurt Decker-Lucke

Archive | 2004

Method and apparatus for the production of purified liquids and vapors

Wilhelm P. Platow; John B. Cracchiolo; Stanislav S. Todorov; Jaime M. Reyes

Archive | 2013

Ion Implant For Defect Control

Andrew M. Waite; Stanislav S. Todorov

Archive | 2007

Determining ion beam parallelism using refraction method

Raymond Callahan; David Olson; Wilhelm P. Platow; Stanislav S. Todorov

Archive | 2016

Selective Processing Of A Workpiece

Morgan D. Evans; Daniel Distaso; Stanislav S. Todorov; Mark R. Amato; William Davis Lee; Jillian Reno

Archive | 2013

METHOD AND SYSTEM FOR FORMING LOW CONTACT RESISTANCE DEVICE

Andrew M. Waite; Yuri Erokhin; Stanislav S. Todorov

Archive | 2013

Improved ion implant for defect control

Andrew M. Waite; Stanislav S. Todorov

Archive | 2016

APPARATUS AND METHOD FOR CONTROLLING IMPLANT PROCESS

George M. Gammel; Morgan D. Evans; Stanislav S. Todorov; Norman E. Hussey; Gregory R. Gibilaro

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Collaboration

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Andrew M. Waite

Varian Semiconductor

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Wilhelm P. Platow

Varian Semiconductor

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David Olson

Varian Semiconductor

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George M. Gammel

Varian Semiconductor

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Kurt Decker-Lucke

Varian Semiconductor

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Morgan D. Evans

Varian Semiconductor

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Norman E. Hussey

Varian Semiconductor

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Raymond Callahan

Varian Semiconductor

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Baonian Guo

Varian Semiconductor

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Benjamin Colombeau

Varian Semiconductor

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