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Stephan Six

Carl Zeiss AG

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Publication

Featured researches published by Stephan Six.

Archive | 2009

Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same

Stephan Six; Michael Lill; Ruediger Duesing; Bernhard Gellrich; Michael Widmann; Andreas Schubert; Tilmann Von Papen; Thomas Ihl

Archive | 2008

Optical element, projection lens and associated projection exposure apparatus

Alexandra Pazidis; Stephan Six; Ruediger Duesing; Gennady Fedosenko

Archive | 2011

Wafer chuck for EUV lithography

Stephan Six

Archive | 2011

OPTICAL IMAGING WITH REDUCED IMMERSION LIQUID EVAPORATION EFFECTS

Stephan Six

Archive | 2006

Microlithographic projection lighting system

Vladimir Kamenov; Daniel Krähmer; Toralf Gruner; Karl-Stefan Weissenrieder; Heiko Feldmann; Achim Zirkel; Alexandra Pazidis; Bruno Thome; Stephan Six

Archive | 2010

Wafer-chuck für die euv-lithographie

Stephan Six

Archive | 2008

An element, in particular an optical element, for immersion lithography

Alexandra Pazidis; Stephan Six; Rüdiger Düsing; Gennady Fedosenko; Papen Tilmann Von; Christoph Zaczek; Wolfgang Henschel

Archive | 2008

Optisches Element, Projektionsobjektiv und Projektionsbelichtungsanlage damit

Rüdiger Düsing; Gennady Fedosenko; Alexandra Pazidis; Stephan Six

Archive | 2007

OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY

Stephan Six; Michael Lill; Rüdiger Düsing; Bernhard Gellrich; Michael Widmann; Andreas Schubert; Papen Tilmann Von; Thomas Ihl

Archive | 2015

Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same,and method for immersion lithography

Stephan Six; Michael Lill; Ruediger Duesing; Bernhard Gellrich; Michael Widmann; Andreas Schubert; Tilmann Von Papen; Thomas Ihl

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Collaboration

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Alexandra Pazidis

Carl Zeiss AG

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Rüdiger Düsing

Carl Zeiss AG

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Andreas Schubert

Carl Zeiss AG

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Bernhard Gellrich

Carl Zeiss AG

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Gennady Fedosenko

Carl Zeiss AG

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Michael Lill

Carl Zeiss AG

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Michael Widmann

Carl Zeiss AG

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Thomas Ihl

Carl Zeiss AG

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Ruediger Duesing

Carl Zeiss AG

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Daniel Krähmer

Carl Zeiss AG

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