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Stephen Bruce Brodsky

IBM

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Publication

Featured researches published by Stephen Bruce Brodsky.

Archive | 1995

Screwless shield assembly for vacuum processing chambers

Michael Rosenstein; Howard Grunes; Stephen Bruce Brodsky

Archive | 1996

Method for selective deposition of refractory metal and device formed thereby

Stephen Bruce Brodsky; Richard A. Conti; Seshadri Subbanna

Archive | 1996

Method of controlling dopant diffusion and metal contamination in thin polycide gate conductor of mosfet device

Karanam Balasubramanyam; Stephen Bruce Brodsky; Richard A. Conti; Badih El-Kareh

Archive | 1986

Coated mask for photolithographic construction of electric circuits

K. Y. Ahn; Saryadevara Basavaiah; Stephen Bruce Brodsky; Charles Anthony Cortellino; Joseph Eli Levine

Archive | 2000

Method for self-aligned formation of silicide contacts using metal silicon alloys for limited silicon consumption and for reduction of bridging

Stephen Bruce Brodsky; Cyril Cabral; Roy A. Carruthers; J. M. E. Harper; Christian Lavoie; Patricia A. O'Neil; Yun Yu Wang

Archive | 1999

Controlled dopant diffusion and metal contamination in thin polycide gate conductor of MOSFET device

Karanam Balasubramanyam; Stephen Bruce Brodsky; Richard A. Conti; Badih El-Kareh

Archive | 2001

Capping layer for improved silicide formation in narrow semiconductor structures

Kenneth J. Giewont; Stephen Bruce Brodsky; Cyril Cabral; Anthony G. Domenicucci; Craig Ransom; Yun-Yu Wang; Horatio S. Wildman; Kwong Hon Wong

Archive | 2000

Damascene-gate process for the fabrication of MOSFET devices with minimum poly-gate depletion, silicided source and drain junctions, and low sheet resistance gate-poly

Diane C. Boyd; Stephen Bruce Brodsky; Hussein I. Hanafi; R. A. Roy

Archive | 1990

Method of making semiconductor device contact including transition metal-compound dopant source

Stephen Bruce Brodsky; Rajiv V. Joshi; John S. Lechaton; James Gardner Ryan; Dominic J. Schepis

Archive | 1987

Stacked metal silicide gate structure with barrier

Stephen Bruce Brodsky; Dan Moy; Rajiv V. Joshi

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Collaboration

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Richard A. Conti

IBM

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Charles Anthony Cortellino

IBM

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Cyril Cabral

IBM

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Diane C. Boyd

IBM

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Hussein I. Hanafi

IBM

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James Gardner Ryan

IBM

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Joseph Eli Levine

IBM

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K. Y. Ahn

IBM

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Karanam Balasubramanyam

IBM

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R. A. Roy

IBM

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