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Dive into the research topics where Steve Sansoni is active.

Publication


Featured researches published by Steve Sansoni.


Archive | 2005

Detachable electrostatic chuck for supporting a substrate in a process chamber

Karl M. Brown; Semyon Sherstinsky; Wei W. Wang; Cheng-Hsiung Tsai; Vineet Mehta; Allen Lau; Steve Sansoni


Archive | 2004

Detachable electrostatic chuck

Karl M. Brown; Nora Arellano; Semyon Sherstinsky; Allen Lau; Cheng-Hsiung Tsai; Vineet Mehta; Steve Sansoni; Wei W. Wang


Archive | 2004

Coating for reducing contamination of substrates during processing

Vijay D. Parkhe; Kurt J. Ahmann; Matthew C. Tsai; Steve Sansoni


Archive | 1997

Method and apparatus for sputter etch conditioning a ceramic body

Nitin Khurana; Vince Burkhart; Steve Sansoni; Vijay D. Parkhe; Eugene Tzou


Archive | 2005

Contaminant reducing support system

Vijay D. Parkhe; Matthew Leopold; Timothy Ronan; Todd W. Martin; Edward Ng; Nitin Khurana; Song-Moon Suh; Richard Fay; Christopher Hagerty; Michael R. Rice; Darryl Angelo; Kurt J. Ahman; Matthew C. Tsai; Steve Sansoni


Archive | 1997

Method and device for controlling surface condition of ceramic substrate

Vince Burkhart; Nitin Khurana; Vijay D. Parkhe; Steve Sansoni; Eugene Tzou; パルケ ヴィージェイ; バークハート ヴィンス; サンソーニ スティーヴ; クーラナ ニティン; ツォウ ユージーン


Archive | 2010

Heat exchange pedestal with coating of diamond-like material

Vijay D. Parkhe; Kurt J. Ahmann; Matthew C. Tsai; Steve Sansoni


Archive | 2012

Apparatus for enabling concentricity of plasma dark space

Alan Ritchie; Donny Young; Keith A. Miller; Muhammad Rasheed; Steve Sansoni; Uday Pai


Archive | 2014

COOLING PEDESTAL WITH COATING OF DIAMOND-LIKE CARBON

Vijay D. Parkhe; Kurt J. Ahmann; Matthew C. Tsai; Steve Sansoni


Archive | 2005

Systeme de transport et de support de substrats a reduction de contaminants

Vijay D. Parkhe; Matthew Leopold; Timothy Ronan; Todd W. Martin; Edward Ng; Nitin Khurana; Song-Moon Suh; Richard Fay; Christopher Hagerty; Michael R. Rice; Darryl Angelo; Kurt J. Ahman; Matthew C. Tsai; Steve Sansoni

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