Victor Nguyen
Applied Materials
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Publication
Featured researches published by Victor Nguyen.
Meeting Abstracts | 2011
Li-Qun Xia; Zhenjiang Cui; Mihaela Balseanu; Victor Nguyen; Kevin Zhou; Mehul Naik
As device nodes move below 20nm and increasing concerns for low k damage during plasma etch, alternative metal hardmask (HM) schemes have gained tractions for back-end-of-line (BEOL) integration. Conventional TiN hardmask has been in high volume manufacturing since the 90nm technology node, however, TiN faces many challenges, such as defectivity, line bending, and manufacturing robustness, which can only be overcome at the expense of shrinking the overall process window. A novel boron nitride (BN) based HM material was developed using a conventional CVD approach to address these issues.
Archive | 2009
Jeong-Uk Huh; Mihaela Balseanu; Li-Qun Xia; Victor Nguyen; Hichem M'Saad
Archive | 2007
Mihaela Balseanu; Victor Nguyen; Li-Qun Xia; Hichem M'Saad; Mei-Yee Shek; Isabelita Roflox
Archive | 2007
Li-Qun Xia; Mihaela Balseanu; Victor Nguyen; Hichem M'Saad; Haichun Yang; Xinliang Lu; Chien-Teh Kao; Mei Chang
Archive | 2006
Mihaela Balseanu; Victor Nguyen; Li-Qun Xia; Vladimir Zubkov; Hichem M'Saad
Archive | 2013
Maitreyee Mahajani; Steven D. Marcus; Li-Qun Xia; Mihaela Balseanu; Victor Nguyen; Ning Li; Jingjing Liu; Sukti Chatterjee; Timothy W. Weidman
Archive | 2014
Victor Nguyen; Isabelita Roflox; Mihaela Balseanu; Li-Qun Xia; Heng Pan; Wei Liu; Malcolm J. Bevan; Christopher S. Olsen; Johanes F. Swenberg
Archive | 2012
Victor Nguyen; Mihaela Balseanu; Li-Qun Xia
Archive | 2011
Victor Nguyen; Mihaela Balseanu; Li-Qun Xia
Archive | 2014
Victor Nguyen; Mihaela Balseanu; Li-Qun Xia; Ning Li; Martin A. Hilkene; Matthew D. Scotney-Castle
