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Szu-An Wu

TSMC

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Publication

Featured researches published by Szu-An Wu.

Archive | 2010

Metal gate structure of a semiconductor device

Shiu-Ko Jangjian; Szu-An Wu; Sheng-Wen Chen

Archive | 2000

Method to solve particle performance of FSG layer by using UFU season film for FSG process

Ming-Hwa Yoo; Yi-Lung Cheng; Szu-An Wu; Ying-Lang Wang

Archive | 2012

Backside Illuminated CMOS Image Sensor

Shiu-Ko Jangjian; Volume Chien; Szu-An Wu

Archive | 2013

METAL GATE STACK HAVING TIALN BLOCKING/WETTING LAYER

Shiu-Ko Jangjian; Szu-An Wu; Ying-Lang Wang; Chi-Wen Liu

Archive | 2013

Oxidation-Free Copper Metallization Process Using In-situ Baking

Yu-Sheng Wang; Shih-Ho Lin; Kei-Wei Chen; Szu-An Wu; Ying-Lang Wang

Archive | 2002

Semiconductor chamber process apparatus and method

Yi-Lung Cheng; Hui-Chi Lin; Szu-An Wu; Ying-Lang Wang

Archive | 2011

N-type field effect transistor, its metal gate and its manufacturing method

Shiu-Ko Jangjian; Szu-An Wu; Sheng-Wen Chen

Archive | 2002

Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film

Ming-Hwa Yoo; Shih-Chi Lin; Yi-Lung Cheng; Szu-An Wu; Ying-Lang Wang

Archive | 2002

Method for reducing contaminants in a CVD chamber

Yi-Lung Cheng; Wen-Kung Cheng; Ming-Hwa Yoo; Szu-An Wu; Ying-Lang Wang; Pei-Fen Chou

Archive | 2014

In-Situ Formation of Silicon and Tantalum Containing Barrier

Shiu-Ko Jangjian; Szu-An Wu; Ting-Chun Wang

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Collaboration

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Shiu-Ko Jangjian

TSMC

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Ying-Lang Wang

TSMC

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Yi-Lung Cheng

TSMC

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Ming-Hwa Yoo

TSMC

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Kei-Wei Chen

TSMC

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Pei-Fen Chou

TSMC

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Sheng-Wen Chen

TSMC

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Shih-Chi Lin

TSMC

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Shih-Ho Lin

TSMC

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Wen-Kung Cheng

TSMC

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