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Dive into the research topics where Takema Ito is active.

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Featured researches published by Takema Ito.


international symposium on semiconductor manufacturing | 2006

Development of a Platform for Collaborative Engineering Data Flow between Design and Manufacturing

Hiroyuki Morinaga; Hidenori Kakinuma; Takema Ito; Tatsuhiko Higashiki

The amount of collaborative engineering data between design and manufacturing is increasing because of the introduction of design for manufacturing (DFM) technology to improve product yield quickly. Therefore, we developed a platform to realize collaborative engineering data flows between design and manufacturing. The platform can facilitate the implementation of flows of yield ramp-up and quick turn-around-time (TAT). The flows can reduce the TA T of information linkage. The flows which improve yield and manufacturability were established on the platform and integrated into the actual LSI production. As a result, we confirmed the improvement of efficiency of the system development and the TAT reduction of information linkage.


Archive | 2005

System and program for making recipe and method for manufacturing products by using recipe

Hiroyuki Morinaga; Takema Ito; Arata Inoue; Takuya Kono; Takashi Sakamoto


Archive | 2004

Apparatus and method of automatically prepairing recipe

Arata Inoue; Takema Ito; Takuya Kono; Hiroyuki Morinaga; Takashi Sakamoto; 新 井上; 武馬 伊藤; 隆 坂元; 裕之 森永; 拓也 河野


Archive | 2004

Design system for delivering data, system for fabricating a semiconductor device, method of communicating writing data, method for fabricating a semiconductor device

Hiroyuki Morinaga; Takema Ito


Archive | 2007

Defect inspecting apparatus, defect inspecting method, semiconductor device manufacturing system, and semiconductor device manufacturing method

Hiroyuki Morinaga; Atsushi Onishi; Masayoshi Yamasaki; Takema Ito; Yasuhiro Kaga


Archive | 2007

Defect inspecting apparatus for semiconductor wafer

Hiroyuki Morinaga; Atsushi Onishi; Masayoshi Yamasaki; Takema Ito; Yasuhiro Kaga


Archive | 2004

System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device

Hiroyuki Morinaga; Takema Ito


international symposium on semiconductor manufacturing | 2007

Development of automatic recipe creation system for exposure tools

Hiroyuki Morinaga; Hidenori Kakinuma; Takema Ito; Arata Inoue


Archive | 2007

Defect inspecting apparatus, defect inspecting method, system of manufacturing semiconductor apparatus, and method of manufacturing the semiconductor apparatus

Takema Ito; Yasuhiro Kaga; Hiroyuki Morinaga; Atsushi Onishi; Masanori Yamazaki


Archive | 2006

Method and device for preparing inspection recipe

Arata Inoue; Takema Ito; Hiroyuki Morinaga; Takamitsu Nagai; Atsushi Onishi

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