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Thanh X. Nguyen

Applied Materials

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Publication

Featured researches published by Thanh X. Nguyen.

Archive | 2011

MAGNETRON DESIGN FOR RF/DC PHYSICAL VAPOR DEPOSITION

Rongjun Wang; Sally Lou; Muhammad Rasheed; Jianxin Lei; Xianmin Tang; Srinivas Gandikota; Ryan Hanson; Tza-Jing Gung; Keith A. Miller; Thanh X. Nguyen

Archive | 2011

Low resistivity tungsten pvd with enhanced ionization and rf power coupling

Yong Cao; Xianmin Tang; Srinivas Gandikota; Wei D. Wang; Zhendong Liu; Kevin Moraes; Muhammad Rasheed; Thanh X. Nguyen; Ananthkrishna Jupudi

Archive | 2011

MAGNET FOR PHYSICAL VAPOR DEPOSITION PROCESSES TO PRODUCE THIN FILMS HAVING LOW RESISTIVITY AND NON-UNIFORMITY

Zhendong Liu; Yong Cao; Xianmin Tang; Srinivas Gandikota; Thanh X. Nguyen; Muhammad Rasheed

Archive | 2013

Variable radius dual magnetron

Thanh X. Nguyen; Rongjun Wang; Muhammad Rasheed; Xianmin Tang

Archive | 2012

Uniformity tuning capable esc grounding kit for rf pvd chamber

Muhammad Rasheed; Rongjun Wang; Thanh X. Nguyen; Alan Ritchie

Archive | 2011

Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming

Yong Cao; Xianmin Tang; Srinivas Gandikota; Wei D. Wang; Zhendong Liu; Kevin Moraes; Muhammad Rasheed; Thanh X. Nguyen; Ananthkrishna Jupudi

Archive | 2014

EXTENDED DARK SPACE SHIELD

Thanh X. Nguyen; Rongjun Wang; Muhammad Rasheed; Xianmin Tang

Archive | 2016

Particle reduction in a physical vapor deposition chamber

Weimin Zeng; Thanh X. Nguyen; Yong Cao

Archive | 2015

APPARATUS FOR PVD DIELECTRIC DEPOSITION

Keith A. Miller; Thanh X. Nguyen; Ilya Lavitsky; Randy Schmieding; Prashanth Kothnur

Archive | 2015

METHODS FOR DEPOSITING DIELECTRIC FILMS VIA PHYSICAL VAPOR DEPOSITION PROCESSES

Weimin Zeng; Thanh X. Nguyen; Yana Cheng; Yong Cao; Daniel Lee Diehl; Srinivas Guggilla; Rongjun Wang; Xianmin Tang

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Muhammad Rasheed

Applied Materials

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Xianmin Tang

Applied Materials

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Yong Cao

Applied Materials

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Rongjun Wang

Applied Materials

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Srinivas Gandikota

Applied Materials

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Keith A. Miller

Applied Materials

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Zhendong Liu

Applied Materials

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Ananthkrishna Jupudi

Applied Materials

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Kevin Moraes

Applied Materials

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Wei D. Wang

Applied Materials

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