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Thomas Adrian Hansen

IBM

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Publication

Featured researches published by Thomas Adrian Hansen.

Archive | 1987

Rie process for etching silicon isolation trenches and polycides with vertical surfaces

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1984

Method of selectively exposing the sidewalls of a trench and its use to the forming of a metal silicide substrate contact for dielectric filled deep trench isolated devices

George Richard Goth; Thomas Adrian Hansen; James Steve Makris

Archive | 1984

Metal silicide channel stoppers for integrated circuits and method for making the same

George Richard Goth; Thomas Adrian Hansen; Robert Thomas Villetto

Archive | 1983

Trench etch process for dielectric isolation

George Richard Goth; Thomas Adrian Hansen; Robert Thomas Villetto

Archive | 1979

Method for fabricating non-reflective semiconductor surfaces by anisotropic reactive ion etching

Thomas Adrian Hansen; Claude Johnson; Robert Ronald Wilbarg

Archive | 1984

Process for forming isolating trenches in integrated circuit devices

George Richard Goth; Thomas Adrian Hansen; Robert Thomas Villetto

Archive | 1979

Method for relief-like structuring of silicon-surfaces

Thomas Adrian Hansen; Jr. Claude Johnson; Robert Ronald Wilbarg

Archive | 1987

Rie-verfahren um isolationsrillen mit senkrechten flanken in silizium und polycid zu aetzen. Rie-moved by isolation grooves with vertical flanks in silicon and polycide etch.

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1987

Rie-verfahren um isolationsrillen mit senkrechten flanken in silizium und polycid zu aetzen.

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1987

Rie-moved by isolation grooves with vertical flanks in silicon and to etch polycide.

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

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Collaboration

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George Richard Goth

IBM

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George A. Kaplita

IBM

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James Allan Bondur

IBM

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John S. Lechaton

IBM

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Nicholas James Giammarco

IBM

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Robert Ronald Wilbarg

IBM

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Robert Thomas Villetto

IBM

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James Steve Makris

IBM

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Claude Johnson

IBM

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Jr. Claude Johnson

IBM

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