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John S. Lechaton

IBM

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Publication

Featured researches published by John S. Lechaton.

Archive | 1987

Rie process for etching silicon isolation trenches and polycides with vertical surfaces

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1982

Total dielectric isolation for integrated circuits

John S. Lechaton; Shashi Dhar Malaviya; Dominic J. Schepis; Gurumakonda R. Srinivasan

Archive | 1970

END POINT DETECTION METHOD AND APPARATUS FOR SPUTTER ETCHING

Janos Havas; John S. Lechaton

Archive | 1977

RF sputtering apparatus having floating anode shield

Joseph Alfon Bialko; John S. Lechaton

Archive | 1980

Method of planarizing silicon dioxide in semiconductor devices

Narasipur G. Anantha; Harsaran Singh Bhatia; John S. Lechaton; James L. Walsh

Archive | 1982

Method for making a base etched transistor integrated circuit

Santosh P. Gaur; John S. Lechaton; Gurumakonda R. Srinivasan

Archive | 1977

Structure for making coplanar layers of thin films

Janos Havas; John S. Lechaton; Skinner Logan

Archive | 1990

Method of making semiconductor device contact including transition metal-compound dopant source

Stephen Bruce Brodsky; Rajiv V. Joshi; John S. Lechaton; James Gardner Ryan; Dominic J. Schepis

Archive | 1973

PARTIAL PLANARIZATION OF ELECTRICALLY INSULATIVE FILMS BY RESPUTTERING

John S. Lechaton; Leo P. Richard; D Smith

Archive | 1976

Forming feedthrough connections for multi-level interconnections metallurgy systems

Bai-Cwo Feng; John S. Lechaton

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Dominic J. Schepis

IBM

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Gurumakonda R. Srinivasan

IBM

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George A. Kaplita

IBM

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Harsaran Singh Bhatia

IBM

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James Allan Bondur

IBM

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Janos Havas

IBM

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Nicholas James Giammarco

IBM

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Santosh P. Gaur

IBM

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Thomas Adrian Hansen

IBM

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Philip Michael Pitner

IBM

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