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George Richard Goth

IBM

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Publication

Featured researches published by George Richard Goth.

Archive | 1981

Lateral device structures using self-aligned fabrication techniques

George Richard Goth; Shashi Dhar Malaviya

Archive | 1986

Self-aligned metal process for integrated circuit metallization

George Richard Goth; Ingrid E. Magdo; Shashi Dhar Malaviya

Archive | 1984

Method of selectively exposing the sidewalls of a trench and its use to the forming of a metal silicide substrate contact for dielectric filled deep trench isolated devices

George Richard Goth; Thomas Adrian Hansen; James Steve Makris

Archive | 1984

Metal silicide channel stoppers for integrated circuits and method for making the same

George Richard Goth; Thomas Adrian Hansen; Robert Thomas Villetto

Archive | 1985

Method of making trench-incorporated monolithic semiconductor capacitor and high density dynamic memory cells including the capacitor

George Richard Goth; Shashi Dhar Malaviya

Archive | 1983

Trench etch process for dielectric isolation

George Richard Goth; Thomas Adrian Hansen; Robert Thomas Villetto

Archive | 1985

Planarization process for organic filling of deep trenches

Nancy Rebecca Cservak; Susan Kay Fribley; George Richard Goth; Mark Anthony Takacs

Archive | 1985

Self-aligned channel stop

George Richard Goth

Archive | 1986

Method of making shallow junction complementary vertical bipolar transistor pair

George Richard Goth

Archive | 1986

Method of forming self-aligned P contact

George Richard Goth

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Collaboration

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Shashi Dhar Malaviya

IBM

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Thomas Adrian Hansen

IBM

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James Steve Makris

IBM

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Max G. Levy

IBM

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Paul C. Parries

IBM

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Bernhard Fiegl

IBM

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Ingrid E. Magdo

IBM

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Mark Anthony Takacs

IBM

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Matthew Sendelbach

IBM

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Nancy Rebecca Cservak

IBM

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