Thomas Ernst

3-D Sequential Integration: A Key Enabling Technology for Heterogeneous Co-Integration of New Function With CMOS

3-D sequential integration stands out from other 3-D schemes as it enables the full use of the third dimension. Indeed, in this approach, 3-D contact density matches with the transistor scale. In this paper, we report on the main advances enabling the demonstration of functional and performant stacked CMOS-FETs; i.e., wafer bonding, low temperature processes (<;650°C) and salicide stabilization achievements. This integration scheme enables fine grain partitioning and thus a gain in performance versus cost ratio linked to separation of heterogeneous technologies on distinct levels. In this work, we will detail examples taking advantage of the unique 3-D contact pitch achieved with sequential 3-D.

CELONCEL: effective design technique for 3-D monolithic integration targeting high performance integrated circuits

3-D monolithic integration (3DMI), also termed as sequential integration, is a potential technology for future gigascale circuits. Since the device layers are processed in sequential order, the size of the vertical contacts is similar to traditional contacts unlike in the case of parallel 3-D integration with through silicon vias (TSVs). Given the advantage of such small contacts, 3DMI enables manufacturing multiple active layers very close to each other. In this work we propose two different strategies of stacking standard cells in 3-D without breaking the regularity of the conventional design flow: a) Vertical stacking of diffusion areas (Intra-Cell stacking) that supports complete reuse of 2-D physical design tools and b) vertical stacking of cells over others (Cell-on-Cell stacking). A placement tool (CELONCEL-placer) targeting the Cell-on-Cell placement problem is proposed to allow high quality 3-D layout generation. Our experiments demonstrate the effectiveness of CELONCEL technique, fetching us an area gain of 37.5%, 15.51% reduction in wirelength, and 13.49% improvement in overall delay, compared with a 2-D case when benchmarked across an interconnect dominated low-density-parity-check (LDPC) decoder at 45nm technology node.