Thomas Schletterer | Researchain

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Featured researches published by Thomas Schletterer.

Archive | 2004

Replacement apparatus for an optical element

Jens Kugler; Franz Sorg; Andreas Wurmbrand; Thomas Schletterer; Thomas Ittner

Archive | 2006

Assembly for adjusting an optical element

Amin Schöppach; Manfred Steinbach; Thomas Schletterer; Ernesto Lopez-Real

Archive | 2009

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

Mariella Beckenbach; Klaus Rief; Andreas Bertele; Benjamin Sigel; Sascha Bleidistel; Wolfgang Hummel; Andreas Frommeyer; Toralf Gruner; Jochen Schwaer; Baerbel Schwaer; Thomas Schletterer; Artur Hoegele; Armin Schoeppach

Archive | 2005

Optical element unit for exposure processes

Bernhard Gellrich; Jens Kugler; Guido Limbach; Julian Kaller; Hans Jürgen Scherle; Dieter Schmerek; Detlev Müller; Thomas Schletterer

Archive | 2007

Projection objective for a microlithography apparatus with improved imaging properties and method for improving the imaging properties of the projection objective

Archive | 2001

Elastic lens mount

Thomas Schletterer

Archive | 2004

Low-deformation support device of an optical element

Dirk Schaffer; Andreas Wurmbrand; Thomas Schletterer

Archive | 2008

Projection lens for micro lithography, has multiple lenses with local optical axis, where one lens is assigned to manipulator with actuators, and input force or input torque is attained by former actuators

Sascha Bleidistel; Andreas Frommeyer; Toralf Gruner; Artur Högele; Wolfgang Hummel; Thomas Schletterer; Armin Schöppach; Bärbel Schwaer; Jochen Schwaer

Archive | 2005