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Andreas Wurmbrand

Carl Zeiss AG

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Publication

Featured researches published by Andreas Wurmbrand.

Archive | 2004

Holding Device for an Optical Element in an Objective

Bernhard Gellrich; Andreas Wurmbrand; Jens Kugler; Armin Schoeppach; Christian Zengerling; Stephane Bruynooghe

Archive | 2004

Replacement apparatus for an optical element

Jens Kugler; Franz Sorg; Andreas Wurmbrand; Thomas Schletterer; Thomas Ittner

Archive | 2008

Device for the low-deformation replaceable mounting of an optical element

Franz Sorg; Andreas Wurmbrand; Thomas Petasch; Dirk Schaffer; Siegfried Wahl

Archive | 2004

Low-deformation support device of an optical element

Dirk Schaffer; Andreas Wurmbrand; Thomas Schletterer

Archive | 2008

IMMERSION LITHOGRAPHY OBJECTIVE

Bernhard Gellrich; Paul Graeupner; Juergen Fischer; Andreas Wurmbrand; Bauke Jansen; Bob Streefkerk; Christiaan Alexander Hoogendam; Johannes Jacobus Matheus Baselmans

Archive | 2012

OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITHOGRAPHY

Viktor Kulitsky; Bernhard Gellrich; Stefan Xalter; Yim-Bun Patrick Kwan; Peter Deufel; Andreas Wurmbrand

Archive | 2016

Verbindungsanordnung für eine Lithographieanlage

Dirk Schaffer; Jens Prochnau; Andreas Wurmbrand

Archive | 2015

Mirror module, in particular for a microlithographic projection exposure apparatus

Jens Prochnau; Dirk Schaffer; Andreas Wurmbrand; Bernhard Gellrich; Markus Kern

Archive | 2014

Microlithographic projection exposure apparatus, mirror module therefor, and method for operating the mirror module

Jens Prochnau; Dirk Schaffer; Andreas Wurmbrand; Bernhard Gellrich; Markus Kern

Archive | 2014

Mikrolithographische Projektionsbelichtungsanlage, Spiegelmodul hierfür, sowie Verfahren zum Betrieb des Spiegelmoduls

Jens Prochnau; Dirk Schaffer; Andreas Wurmbrand; Bernhard Gellrich; Markus Kern

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Bernhard Gellrich

Carl Zeiss AG

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Jens Kugler

Carl Zeiss AG

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Dirk Schaffer

Carl Zeiss AG

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Franz Sorg

Carl Zeiss AG

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Thomas Schletterer

Carl Zeiss AG

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Jens Prochnau

Carl Zeiss AG

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Thomas Ittner

Carl Zeiss AG

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Markus Kern

Carl Zeiss AG

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Armin Schoeppach

Carl Zeiss AG

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Christian Zengerling

Carl Zeiss AG

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