Franz Sorg | Researchain

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Publication

Featured researches published by Franz Sorg.

Archive | 2005

Exposure apparatus and measuring device for a projection lens

Albrecht Ehrmann; Ulrich Wegmann; Rainer Hoch; Joerg Mallmann; Karl-Heinz Schuster; Ulrich Loering; Toralf Gruner; Bernhard Kneer; Bernhard Geuppert; Franz Sorg; Jens Kugler; Norbert Wabra

Archive | 2001

Optical element deformation system

Frank Melzer; Michael Mühlbeyer; Bernhard Gellrich; Franz Sorg; Stefan Xalter; Thomas Ittner

Archive | 2004

Replacement apparatus for an optical element

Jens Kugler; Franz Sorg; Andreas Wurmbrand; Thomas Schletterer; Thomas Ittner

Archive | 2009

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

Guido Limbach; Franz Sorg; Armin Schoeppach; Ulrich Weber; Ulrich Loering; Dirk Hellweg; Peter Meyer; Stefan Xalter; Jens Kugler; Bernhard Gellrich; Stefan Hembacher; Bernhard Geuppert; Aksel Goehnermeier

Archive | 2002

System for damping oscillations

Franz Sorg; Stefan Xalter; Frank Melzer; Bernhard Gellrich; Michael Muehlbeyer

Archive | 2014

Optical Module for an Objective

Jens Kugler; Franz Sorg; Yim-Bun Patrick Kwan

Archive | 2001

Oscillation damping system

Franz Sorg; Stefan Xalter; Michael Muehlbeyer; Bernhard Gellrich; Frank Melzer; Thomas Ittner

Archive | 2008

Microlithographic projection exposure apparatus and measuring device for a projection lens

Albrecht Ehrmann; Ulrich Wegmann; Rainer Hoch; Joerg Mallmann; Karl-Heinz Schuster; Ulrich Loering; Toralf Gruner; Bernhard Kneer; Bernhard Geuppert; Franz Sorg; Jens Kugler; Norbert Wabra

Archive | 2008

Device for the low-deformation replaceable mounting of an optical element

Franz Sorg; Andreas Wurmbrand; Thomas Petasch; Dirk Schaffer; Siegfried Wahl

Archive | 2006

Lithographic apparatus, device manufacturing method and exchangeable optical element

Erik Roelof Loopstra; Adrianus Franciscus Petrus Engelen; Bernardus Antonius Johannes Luttikhuis; Maria Johanna Agnes Rubingh; Johannes Martinus Andreas Hazenberg; Laurentius Catrinus Jorritsma; Johannes Wilhelmus De Klerk; Bernhard Geuppert; Aart Adrianus Van Beuzekom; Petrus Franciscus Wilhelmus Maria Mandigers; Franz Sorg; Peter Deufel; Peter Schaap

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