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Thure Boehm

Carl Zeiss AG

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Publication

Featured researches published by Thure Boehm.

Archive | 2002

Method of making a fracture-resistant calcium fluoride single crystal and its use

Joerg Kandler; Ewald Moersen; Burkhard Speit; Harry Bauer; Thure Boehm; Eric Eva; Michael Thier; Hexin Wang; Frank Richter; Hans-Josef Prof. Paus

Archive | 2009

REPAIR METHOD FOR OPTICAL ELEMENTS HAVING A COATING AND CORRESPONDING OPTICAL ELEMENTS

Thure Boehm

Archive | 2011

Mirror, projection objective comprising such a mirror, and projection exposure apparatus for microlithography comprising such a projection objective

Rolf Freimann; Norman Baer; Guido Limbach; Thure Boehm; Gero Wittich

Archive | 2013

Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective

Rolf Freimann; Norman Baer; Guido Limbach; Thure Boehm; Gero Wittich

Archive | 2002

Method of producing calcium fluoride single crystal having fracture resistance and its use

Harry Bauer; Thure Boehm; Eric Eva; Joerg Kandler; Ewald Moersen; Hans-Josef Prof. Paus; Frank Richter; Burkhard Speit; Michael Thier; Hexin Wang; イェルグ、カンドラー; エヴァルト、メルゼン; エリック・エヴァ; チューレ、ベーム; ハリー、バウワー; ハンス−ヨーゼフ、パウス; フランク・リヒター; ブルクハルド、シュパイト; ヘキシン、ヴァン; ミヒャエル、ティヤー

Archive | 2009

METHOD AND APPARATUS FOR PRODUCING AN ELEMENT HAVING AT LEAST ONE FREEFORM SURFACE HAVING A HIGH ACCURACY OF FORM AND A LOW SURFACE ROUGHNESS

Thure Boehm; Stefan Burkart; Hans-Juergen Mann; Danny Chan; Holger Maltor

Archive | 2006

IMAGING SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM

Franz Josef Stickel; Thure Boehm; Christoph Zaczek

Archive | 2011

Miroir, objectif de projection comprenant un tel miroir et appareil d'exposition par projection pour une microlithographie comprenant un tel objectif de projection

Rolf Freimann; Norman Baer; Guido Limbach; Thure Boehm; Gero Wittich

Archive | 2005

Use of nanocrystalline ceria in EUV lithography optics polishing; Technical Digest

Patrick G. Murray; Thure Boehm; Holger Maltor

Archive | 2001

Device for receiving an optical element made from crystalline calcium fluoride comprises an intermediate element arranged between a unit for holding the optical element and the optical element

Juergen Hartmaier; Dietrich Klaasen; Thure Boehm; Bernhard Wergl; Michael Gerhard; Jens Spanuth; Ralf Kuschnereit; Peter Vogt; Harry Bauer

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Gero Wittich

Carl Zeiss AG

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Guido Limbach

Carl Zeiss AG

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Harry Bauer

Carl Zeiss AG

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Norman Baer

Carl Zeiss AG

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Rolf Freimann

Carl Zeiss AG

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Eric Eva

Carl Zeiss AG

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Holger Maltor

Carl Zeiss AG

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Michael Thier

Carl Zeiss AG

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Bernhard Wergl

Carl Zeiss AG

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Christoph Zaczek

Carl Zeiss AG

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