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Dive into the research topics where Sudhir Gondhalekar is active.

Publication


Featured researches published by Sudhir Gondhalekar.


Archive | 2000

Directing a flow of gas in a substrate processing chamber

Laxman Murugesh; Padmanaban Krishnaraj; Michael S. Cox; Canfeng Lai; Narendra Dubey; Tom K. Cho; Sudhir Gondhalekar; Lily L. Pang


Archive | 2002

High density plasma CVD chamber

Sudhir Gondhalekar; Tom K. Cho; Rolf A. Guenther; Shigeru Takehiro; Masayoshi Nohira; Tetsuya Ishikawa; Ndanka O. Mukuti


Archive | 2003

Gas delivery system for semiconductor processing

Sudhir Gondhalekar; Padmanabhan Krishnaraj; Tom K. Cho; Muhammad Rasheed; Hemant P. Mungekar; Thanh Pham; Zhong Qiang Hua


Archive | 2007

Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing

Dmitry Lubomirsky; Sudhir Gondhalekar; Kadthala R. Narendrnath; Muhammad Rasheed; Tony S. Kaushal


Archive | 2007

Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing

Kadthala R. Narendrnath; Sudhir Gondhalekar; Dmitry Lubomirsky; Muhammad Rasheed; Tony S. Kaushal


Archive | 2007

Method of making an electrostatic chuck with reduced plasma penetration and arcing

Dmitry Lubomirsky; Kadthala Ramaya Narendranath; Sudhir Gondhalekar; Muhammad Rasheed; Tony S. Kaushal


Archive | 2002

Substrate support with extended radio frequency electrode upper surface

Sudhir Gondhalekar; Dongqing Li; Canfeng Lai; Zhengquan Tan; Steve H. Kim; Alexander Veyster


Archive | 2002

Upper chamber for high density plasma CVD

Sudhir Gondhalekar; Tom K. Cho; Rolf A. Guenther; Steve H. Kim; Mehrdad Moshfegh; Shigeru Takehiro; Thomas Kring; Tetsuya Ishikawa


Archive | 2005

Gas distribution system for improved transient phase deposition

Sudhir Gondhalekar; Robert Duncan; Siamak Salimian; Muhammad Rasheed; Harry Whitesell; Bruno Geoffrion; Padmanabhan Krishnaraj; Rudolf Gujer


Archive | 2009

Remote plasma clean process with cycled high and low pressure clean steps

Zhong Qiang Hua; Sanjay Kamath; Young S. Lee; Ellie Yieh; Hien-Minh Huu Le; Anjana M. Patel; Sudhir Gondhalekar

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