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Kwok Manus Wong

Applied Materials

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Publication

Featured researches published by Kwok Manus Wong.

Archive | 2000

Porous ceramic liner for a plasma source

Kartik Ramaswamy; Kwok Manus Wong; Ashish Bhatnagar; Mehran Moalem; Tony S. Kaushal; Shamouil Shamouilian

Archive | 2007

Substrate support having heat transfer system

Andrew Nguyen; Wing L. Cheng; Hiroji Hanawa; Semyon L. Kats; Kartik Ramaswamy; Yan Ye; Kwok Manus Wong; Daniel J. Hoffman; Tetsuya Ishikawa; Brian Lue

Archive | 2000

Plasma chamber support having dual electrodes

Shamouil Shamouilian; Arnold Kholodenko; Kwok Manus Wong; Liang-Guo Wang; Alexander M. Veytser; Dennis S. Grimard

Archive | 2000

Erosion resistant gas energizer

Ashish Bhatnagar; Kartik Ramaswamy; Tony S. Kaushal; Kwok Manus Wong; Shamouil Shamouilian

Archive | 2000

Plasma chamber support with coupled electrode

Shamouil Shamouilian; Jon M. Mcchesney; Kwok Manus Wong; Liang-Guo Wang; Alexander M. Veytser; Dennis S. Grimard

Archive | 2010

Substrate support having fluid channel

Andrew Nguyen; Wing L. Cheng; Hiroji Hanawa; Semyon L. Kats; Kartik Ramaswamy; Yan Ye; Kwok Manus Wong; Daniel J. Hoffman; Tetsuya Ishikawa; Brian Lue

Archive | 2001

RF power delivery for plasma processing using modulated power signal

Liang-Guo Wang; Kwok Manus Wong; Shamouil Shamouilian; Kartik Ramaswamy

Archive | 2001

Heated catalytic treatment of an effluent gas from a substrate fabrication process

Tony S. Kaushal; Shamouil Shamouilian; Harshad Borgaonkar; Kwok Manus Wong; Michael G. Chafin; Ashish Bhatnagar

Archive | 2002

Plasma processing chamber having magnetic assembly and method

Robert W. Wu; Wing L. Cheng; You Wang; Senh Thach; Hamid Noorbakhsh; Kwok Manus Wong; Jennifer Y. Sun

Archive | 2002

Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber

Ananda H. Kumar; Tetsuya Ishikawa; Kwok Manus Wong; Farahmand E. Askarinam

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Collaboration

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Shamouil Shamouilian

Applied Materials

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Kartik Ramaswamy

Applied Materials

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Ashish Bhatnagar

Applied Materials

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Liang-Guo Wang

Applied Materials

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Tony S. Kaushal

Applied Materials

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Dennis S. Grimard

Applied Materials

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Alexander M. Veytser

Applied Materials

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Arnold Kholodenko

Applied Materials

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Semyon L. Kats

Applied Materials

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Tetsuya Ishikawa

Applied Materials

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