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Torsten Huisinga

GlobalFoundries

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Publication

Featured researches published by Torsten Huisinga.

Archive | 2010

Semiconductor Device Comprising Through Hole Vias Having a Stress Relaxation Mechanism

Torsten Huisinga; Michael Grillberger; Jens Hahn

Archive | 2012

REPLACEMENT GATE ELECTRODE FILL AT REDUCED TEMPERATURES

Jens Hahn; Torsten Huisinga; Klaus Hempel; Oisin Kenny

Archive | 2011

Semiconductor Device Comprising a Contact Structure with Reduced Parasitic Capacitance

Jens Heinrich; Kai Frohberg; Torsten Huisinga; Ronny Pfuetzner

Archive | 2011

Selective shrinkage of contact elements in a semiconductor device

Kai Frohberg; Ralf Richter; Torsten Huisinga; Katrin Reiche

Archive | 2010

Sophisticated metallization systems in semiconductors formed by removing damaged dielectric layers after forming the metal features

Torsten Huisinga; Michael Grillberger; Frank Feustel

Archive | 2009

Hybridkontaktstruktur mit Kontakten mit kleinem Aspektverhältnis in einem Halbleiterbauelement

Jens Heinrich; Ralf Richter; Torsten Huisinga; Kai Frohberg

Archive | 2014

Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects

Torsten Huisinga; Carsten Peters; Andreas Ott; Axel Preusse

Archive | 2014

SEMICONDUCTOR DEVICE COMPRISING CONTACT STRUCTURES WITH PROTECTION LAYERS FORMED ON SIDEWALLS OF CONTACT ETCH STOP LAYERS

Kai Frohberg; Marco Lepper; Katrin Reiche; Torsten Huisinga

Archive | 2012

REDUCING LINE EDGE ROUGHNESS IN HARDMASK INTEGRATION SCHEMES

Oisin Kenny; Torsten Huisinga

Archive | 2013

METHODS OF FORMING A PROTECTION LAYER TO PROTECT A METAL HARD MASK LAYER DURING LITHOGRAPHY REWORKING PROCESSES

Torsten Huisinga; Keith Donegan; Robert Seidel

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Collaboration

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Ralf Richter

GlobalFoundries

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Jens Heinrich

GlobalFoundries

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Kai Frohberg

Advanced Micro Devices

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Jens Hahn

GlobalFoundries

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Michael Grillberger

GlobalFoundries

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Carsten Peters

GlobalFoundries

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Kai Frohberg

Advanced Micro Devices

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Oliver Mieth

GlobalFoundries

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Bernd Hintze

GlobalFoundries

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Frank Feustel

Advanced Micro Devices

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