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Toshiharu Nishimura

Tokyo Electron

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Publication

Featured researches published by Toshiharu Nishimura.

Archive | 1994

Film forming method wherein a partial pressure of a reaction byproduct in a processing container is reduced temporarily

Masayuki Imai; Toshiharu Nishimura

Archive | 1994

Method of cleaning a process tube with ClF3 gas and controlling the temperature of process

Toshiharu Nishimura

Archive | 1995

Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus

Reiji Niino; Yoshiyuki Fujita; Hideki Lee; Yasuo Imamura; Toshiharu Nishimura; Yuuichi Mikata; Shinji Miyazaki; Takahiko Moriya; Katsuya Okumura; Hitoshi Kato

Archive | 1993

Method of cleaning reaction tube

Reiji Niino; Yoshiyuki Fujita; Hideki Lee; Yasuo Imamura; Toshiharu Nishimura; Yuuichi Mikata; Shinji Miyazaki; Takahiko Moriya; Katsuya Okumura

Archive | 2007

Cleaning method for thin film forming apparatus, thin film forming method, and thin film forming apparatus

Toshiharu Nishimura; Mitsuhiro Okada; Satoshi Takagi; Masahiko Tomita; Yamato Tonegawa; 正彦 冨田; 充弘 岡田; 大和 戸根川; 俊治 西村; 聡史 高木

Archive | 2008

Film formation apparatus and method for using the same

Mitsuhiro Okada; Satoshi Mizunaga; Yamato Tonegawa; Toshiharu Nishimura

Archive | 2005

Method of cleaning thin film deposition system, thin film deposition system and program

Mitsuhiro Okada; Atsushi Endo; Toshiharu Nishimura; Kazuhide Hasebe

Archive | 1995

Method of forming doped film

Shinichi Jintate; Yoshihiko Okamoto; Toshiharu Nishimura; Atsushi Hosaka

Archive | 2007

Semiconductor processing apparatus and method for using same

Masahiko Tomita; Kota Umezawa; Ryou Son; Toshiharu Nishimura

Archive | 2008

Method for forming poly-silicon film

Mitsuhiro Okada; Takahiro Miyahara; Toshiharu Nishimura

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Collaboration

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Mitsuhiro Okada

Tokyo Electron

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Masahiko Tomita

Tokyo Electron

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Yamato Tonegawa

Tokyo Electron

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Hideki Lee

Tokyo Electron

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Katsuya Okumura

Tokyo Electron

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Kazuhide Hasebe

Tokyo Electron

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Reiji Niino

Tokyo Electron

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Shinji Miyazaki

Tokyo Electron

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Takahiko Moriya

Tokyo Electron

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Yasuo Imamura

Tokyo Electron

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