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Tuan A. Vo

IBM

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Publication

Featured researches published by Tuan A. Vo.

Archive | 2012

SELF-ALIGNED COMPOSITE M-MOx/DIELECTRIC CAP FOR Cu INTERCONNECT STRUCTURES

Son Van Nguyen; Alfred Grill; Thomas J. Haigh; Hosadurga Shobha; Tuan A. Vo

Archive | 2015

Substrate bonding with diffusion barrier structures

Daniel C. Edelstein; Douglas C. La Tulipe; Wei Lin; Deepika Priyadarshini; Spyridon Skordas; Tuan A. Vo; Kevin R. Winstel

Archive | 2015

Titanium oxynitride hard mask for lithographic patterning

Son Van Nguyen; Tuan A. Vo; Christopher J. Waskiewicz

Archive | 2012

CORROSION/ETCHING PROTECTION IN INTEGRATION CIRCUIT FABRICATIONS

Wei Lin; Son Van Nguyen; Vamsi Paruchuri; Tuan A. Vo

Archive | 2010

ENHANCED BONDING INTERFACES ON CARBON-BASED MATERIALS FOR NANOELECTRONIC DEVICES

Christos D. Dimitrakopoulos; Damon B. Farmer; Alfred Grill; Stephen M. Gates; Tuan A. Vo; Deborah A. Neumayer; Son Van Nguyen

Archive | 2013

Wafer-to-wafer oxide fusion bonding

Wei Lin; Deepika Priyadarshini; Spyridon Skordas; Tuan A. Vo

Archive | 2015

MANGANESE OXIDE HARD MASK FOR ETCHING DIELECTRIC MATERIALS

Wei Lin; Spyridon Skordas; Tuan A. Vo

Archive | 2014

SEMICONDUCTOR CHIPS WITH SMALL SCALE STRUCTURES FOR LIQUID COOLING

Wei Lin; Son Van Nguyen; Spyridon Skordas; Tuan A. Vo

Archive | 2014

WAFER-TO-WAFER FUSION BONDING CHUCK

Wei Lin; Spyridon Skordas; Tuan A. Vo

Archive | 2015

Semiconductor package with structures for cooling fluid retention

Wei Lin; Son Van Nguyen; Spyridon Skordas; Tuan A. Vo

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Wei Lin

IBM

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Son Van Nguyen

IBM

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Spyridon Skordas

IBM

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Alfred Grill

IBM

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Deepika Priyadarshini

IBM

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Hosadurga Shobha

IBM

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Thomas J. Haigh

IBM

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Vamsi Paruchuri

IBM

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Christopher J. Waskiewicz

IBM

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Christos D. Dimitrakopoulos

IBM

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