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Dive into the research topics where Veronika Polei is active.

Publication


Featured researches published by Veronika Polei.


MRS Proceedings | 2007

Localized Charge Trapping Memory Cells in a 63 nm Generation with Nanoscale Epitaxial Cobalt Salicide Buried Bitlines

Torsten Mueller; Christoph Kleint; C. Fitz; M. Isler; S. Riedel; Jens-Uwe Sachse; Dominik Olligs; H. Boubekeur; F. Heinrichsdorf; Veronika Polei; David Pritchard; M. Verhoeven; L. Lattard; M. Markert; C. Schupke; B. Tippelt; S. Teichert; R. Reisdorf; C. Ludwig; E.G. Stein v. Kamienski; T. Mikolajick; Nicolas Nagel

A 63nm Twin Flash memory cell with a size of 0.0225μm 2 per 2 (or 4) bits is presented. To achieve small cell areas, a buried bit line and an aggressive gate length of 100 nm are the key features of this cell together with a minimum thermal budget processing. A novel epitaxial CoSi 2 process allows the salicidation of local buried bitlines with only a few tens of nanometer width.


Archive | 2005

Semiconductor memory device and method of production

Lars Bach; Dominik Dr. Olligs; Torsten Mueller; Veronika Polei


Archive | 2002

MEMORY CELL FABRICATION METHOD AND MEMORY CELL CONFIGURATION

Josef Willer; Veronika Polei


Archive | 2005

Method for forming a semiconductor product and semiconductor product

Thomas Mikolajick; Torsten Mueller; Nicolas Nagel; Lars Bach; Dominik Dr. Olligs; Veronika Polei


Archive | 2005

Methods of forming nanocrystals

Laura Pescini; Achim Gratz; Veronika Polei


Archive | 2003

Method for the production of a memory cell and structure thereof

Veronika Polei; Josef Willer


Archive | 2005

Memory cell arrays and methods for producing memory cell arrays

Dominik Dr. Olligs; Torsten Mueller; Karl-Heinz Kuesters; Veronika Polei; Thomas Mikolajick; Josef Willer


Archive | 2002

Method for detecting removal of organic material from a semiconductor device in a manufacturing process

Veronika Polei; Martin Welzel


Archive | 2006

Memory cell array and method of forming a memory cell array

Dominik Dr. Olligs; Veronika Polei


Archive | 2005

Method for producing bit lines for UCP flash memories

Achim Gratz; Mayk Roehrich; Veronika Polei

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Lars Bach

Infineon Technologies

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Thomas Mikolajick

Dresden University of Technology

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