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Dive into the research topics where Irene Sperl is active.

Publication


Featured researches published by Irene Sperl.


Archive | 2004

Method of forming a silicon dioxide layer

Albert Birner; Matthias Goldbach; Irene Sperl


Archive | 2001

Method for increasing the trench capacitance

Klaus-Dieter Morhard; Irene Sperl; Klaus Penner


Archive | 2003

Method for producing an antifuse and antifuse for the selective electrical connection of adjacent conductive regions

Matthias Lehr; Uwe Schilling; Veronika Polei; Irene Sperl


Archive | 2002

A method of forming a silicon dioxide layer on a curved silicon surface

Albert Birner; Matthias Goldbach; Irene Sperl


Archive | 2001

Method for producing an antifuse and antifuse for allowing selective electrical connection of neighbouring conductive zones

Matthias Lehr; Uwe Schilling; Veronika Polei; Irene Sperl


Archive | 2002

Procede permettant de former une couche de dioxyde de silicium

Albert Birner; Matthias Goldbach; Irene Sperl


Archive | 2001

A process for the production of structures in a semiconductor circuit, wherein a reduction of plasma-induced charging occurs

Jakob Kriz; Achim Gratz; Veronika Polei; Irene Sperl; Thomas Ruder


Archive | 2001

Verfahren zur Bildung einer Siliziumdioxidschicht auf einer gekrümmten Silizium-Oberfläche

Albert Birner; Matthias Goldbach; Irene Sperl


Archive | 2001

Verfahren zur Herstellung von Strukturen in einer Halbleiterschaltung, wobei eine Verringerung plasmainduzierter Aufladung eintritt A process for the production of structures in a semiconductor circuit, wherein a reduction of plasma-induced charging occurs

Jakob Kriz; Achim Gratz; Veronika Polei; Irene Sperl; Thomas Ruder


Archive | 2001

Method of increasing the capacity of trench capacitors

Klaus-Dieter Morhard; Irene Sperl; Klaus Penner

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