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Vincent E. Burkhart

Applied Materials

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Publication

Featured researches published by Vincent E. Burkhart.

Archive | 1996

Wafer spacing mask for a substrate support chuck and method of fabricating same

Vincent E. Burkhart; Michael Sugarman; Howard Grunes

Archive | 1999

Method and apparatus for reducing thermal gradients within a substrate support

Vincent E. Burkhart; Steven V. Sansoni; Michael Sugarman; Anthony Chan

Archive | 2004

Selectable dual position magnetron

Tza-Jing Gung; Hong S. Yang; Anantha K. Subramani; Maurice E. Ewert; Keith A. Miller; Vincent E. Burkhart

Archive | 1997

Apparatus for wafer detection

Vincent E. Burkhart; Deepak Manaoharlal

Archive | 2000

Method and apparatus for wafer detection

Vincent E. Burkhart; Deepak Manaoharlal

Archive | 2005

Magnetron having continuously variable radial position

Keith A. Miller; Anantha K. Subramani; Maurice E. Ewert; Tza-Jing Gung; Hong S. Yang; Vincent E. Burkhart

Archive | 2002

Method and apparatus for sealing electrical contacts during an electrochemical deposition process

Arthur Keigler; Harald Herchen; Vincent E. Burkhart; Son Trinh

Archive | 2001

Laminated ceramic with multilayer electrodes and method of fabrication

Vincent E. Burkhart

Archive | 1998

Method and apparatus for predicting failure of an eletrostatic chuck

Vijay D. Parkhe; Steven V. Sansoni; Vincent E. Burkhart

Archive | 1997

Insulated wafer spacing mask for a substrate support chuck and method of fabricating same

Vincent E. Burkhart

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Harald Herchen

Applied Materials

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Michael Sugarman

Applied Materials

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Steven V. Sansoni

Applied Materials

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Anantha K. Subramani

Applied Materials

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Hong S. Yang

Applied Materials

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Howard Grunes

Applied Materials

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Keith A. Miller

Applied Materials

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Maurice E. Ewert

Applied Materials

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Allen Flanigan

Applied Materials

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Deepak Manaoharlal

Applied Materials

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