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Vladimir Davydenko

Carl Zeiss AG

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Publication

Featured researches published by Vladimir Davydenko.

Archive | 2005

Projection exposure system, beam delivery system and method of generating a beam of light

Matthias Kuss; Damian Fiolka; Gerd Reisinger; Manfred Maul; Vladimir Davydenko

Archive | 2012

Mirror element for extreme UV projection exposure system, has mirror surfaces comprising smooth surface with quadratic roughness of specific value and micro-structure with specific period length and specific amplitude

Vladimir Davydenko

Archive | 2005

Beam delivery system and projection exposure system

Matthias Kuss; Damian Fiolka; Gerd Reisinger; Manfred Maul; Vladimir Davydenko

Archive | 2017

Method of variably attenuating a beam of projection light in an optical system of a microlithographic apparatus

Vladimir Davydenko; Eric Eva; Markus Degünther

Archive | 2017

ILLUMINATION SYSTEM OF MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Deguenther Markus; Vladimir Davydenko; Thomas Korb; Frank Schlesener; Steganie Hilt; Wolfgang Hoegele

Archive | 2017

Vorrichtung zur Formung von Laserstrahlung sowie Beleuchtungssytem

Axel Scholz; Horst Maurer; Vladimir Davydenko; Ralf Stützle; Frank Schlesener; Andre Bresan; Heiko Siekmann

Archive | 2017

Beleuchtungssystem einer mikrolithographischen Projektionsanlage und Verfahren zum Betreiben eines solchen Systems

Markus Degünther; Vladimir Davydenko; Dirk Jürgens; Thomas Korb

Archive | 2016

Steuerung für Mikrospiegelanordnungen in Lithographiesystemen Controller for micromirror arrays in lithography systems

Jan Horn; Johannes Eisenmenger; Markus Degünther; Vladimir Davydenko

Archive | 2016

Optical hollow waveguide assembly

Stefan Wolfgang Schmidt; Markus Deguenther; Vladimir Davydenko

Archive | 2016

Illumination system of a microlithographic projection device and method for operating such a system

Markus Degünther; Vladimir Davydenko; Dirk Jürgens; Thomas Korb

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Markus Degünther

Carl Zeiss AG

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Thomas Korb

Carl Zeiss AG

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Frank Schlesener

Carl Zeiss AG

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Johannes Eisenmenger

Carl Zeiss AG

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Axel Scholz

Carl Zeiss AG

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Dirk Jürgens

Carl Zeiss AG

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Andre Bresan

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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Gerd Reisinger

Carl Zeiss AG

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Heiko Siekmann

Carl Zeiss AG

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