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Thomas Korb

Carl Zeiss AG

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Publication

Featured researches published by Thomas Korb.

Archive | 2013

Method for measuring an optical system

Thomas Korb; Christian Hettich; Michael Layh; Ulrich Wegmann; Karl-Heinz Schuster; Matthias Manger

Archive | 2011

Optical system for a microlithographic projection apparatus

Ingo Sänger; Ralf Scharnweber; Olaf Dittmann; Toralf Gruner; Gundula Weiss; András G. Major; Martin Vogt; Markus Degünther; Johannes Wangler; Thomas Korb; Severin Waldis

Archive | 2015

Bündelverteilungsoptik, Beleuchtungsoptik mit einer derartigen Bündelverteilungsoptik, optisches System mit einer derartigen Beleuchtungsoptik sowie Projektionsbelichtungsanlage mit einem derartigen optischen System

Markus Degünther; Michael Patra; Thomas Korb

Archive | 2013

Method for measuring optical system to manufacture microstructured components, involves computing spatial diagnosis distribution of property of reference surfaces from measurement values of variables of bundles and incidence regions

Thomas Korb

Archive | 2018

METHOD FOR MICROLITHOGRAPHIC PRODUCTION OF MICROSTRUCTURED COMPONENTS AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Thomas Korb; Markus Degünther; Jörg Zimmermann; Stephanus Fengler

Archive | 2018

VERFAHREN ZUR MIKROLITHOGRAPHISCHEN HERSTELLUNG MIKROSTRUKTURIERTER BAUELEMENTE, SOWIE MIKROLITHOGRAPHISCHE PROJEKTIONSBELICHTUNGSANLAGE

Thomas Korb; Markus Degünther; Jörg Zimmermann; Stephanus Fengler

Archive | 2017

ILLUMINATION SYSTEM OF MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Deguenther Markus; Vladimir Davydenko; Thomas Korb; Frank Schlesener; Steganie Hilt; Wolfgang Hoegele

Archive | 2017

Beleuchtungssystem einer mikrolithographischen Projektionsanlage und Verfahren zum Betreiben eines solchen Systems

Markus Degünther; Vladimir Davydenko; Dirk Jürgens; Thomas Korb

Archive | 2016

Illumination system of a microlithographic projection device and method for operating such a system

Markus Degünther; Vladimir Davydenko; Dirk Jürgens; Thomas Korb

Archive | 2016

LIGHTING SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM AND METHOD FOR OPERATING SUCH A LIGHTING SYSTEM

Markus Degünther; Vladimir Davydenko; Thomas Korb; Johannes Eisenmenger

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Collaboration

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Markus Degünther

Carl Zeiss AG

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Vladimir Davydenko

Carl Zeiss AG

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Johannes Eisenmenger

Carl Zeiss AG

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Dirk Jürgens

Carl Zeiss AG

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Frank Schlesener

Carl Zeiss AG

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Michael Patra

Carl Zeiss AG

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András G. Major

Carl Zeiss AG

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Gundula Weiss

Carl Zeiss AG

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Ingo Sänger

Carl Zeiss AG

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Johannes Wangler

Carl Zeiss AG

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