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Willi Anderl

Carl Zeiss AG

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Publication

Featured researches published by Willi Anderl.

Archive | 2008

Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component

Wilhelm Egle; Wolfgang Hafner; Willi Anderl; Ulrich Bingel; Holger Muenz; Thomas Neidhardt

Archive | 2007

Optisches Bauelement mit verbessertem thermischen Verhalten

Willi Anderl; Ulrich Bingel; Bernhard Weigl; Udo Dinger; Jochen Kuhn; Piotr Marczuk; Wolfgang Hafner; Axel Matthes

Archive | 2006

Optical component, inparticular collector for use in euv lithography

Willi Anderl; Ulrich Bingel; Bernhard Weigl; Udo Dinger; Jochen Kuhn; Piotr Marczuk; Wolfgang Hafner; Axel Matthes

Archive | 2011

Reflektives optisches Element zur Verwendung in einem EUV-System

Holger Kierey; Michel Le Maire; Willi Anderl; Hubert Holderer; Anton Lengel

Archive | 2010

REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM

Holger Kierey; Michel Le Maire; Willi Anderl; Hubert Holderer; Anton Lengel

Archive | 2012

Optische Anordnung für eine EUV-Projektionsbelichtungsanlage sowie Verfahren zum Kühlen eines optischen Bauelements

Willi Anderl; Holger Kierey; Markus Bauer; Severin Waldis; András G. Major

Archive | 2007

Apparatus for laser annealing of large substrates and method for laser annealing of large substrates

Rafael Egger; Piotr Marczuk; Wolfgang Seifert; Thorsten Tritschler; Markus Zenzinger; Willi Anderl; Jörg Walther

Archive | 2005

Optical component having an improved thermal behavior

Wilhelm Egle; Wolfgang Hafner; Willi Anderl; Ulrich Bingel; Holger Münz; Thomas Neidhardt

Archive | 2010

Metrology module for laser system

Holger Münz; Willi Anderl; Johannes Kraus; Andreas Heinrich

Archive | 2016

Kühler zur Verwendung in einer Vorrichtung im Vakuum

Willi Anderl; Bernhard Weigl; Ann-Kathrin Wandner; Holger Kierey; Arno Schmittner; Markus Bauer; Marcus Schmelzeisen; Andreas Kolloch

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Holger Kierey

Carl Zeiss AG

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Markus Bauer

Carl Zeiss AG

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Ulrich Bingel

Carl Zeiss AG

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Bernhard Weigl

Carl Zeiss AG

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Wolfgang Hafner

Carl Zeiss AG

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Hubert Holderer

Carl Zeiss AG

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Andreas Kolloch

Carl Zeiss AG

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András G. Major

Carl Zeiss AG

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Ann-Kathrin Wandner

Carl Zeiss AG

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Arno Schmittner

Carl Zeiss AG

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