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Dive into the research topics where William L. Guthrie is active.

Publication


Featured researches published by William L. Guthrie.


Archive | 2003

Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus

Manoocher Birang; Allan Gleason; William L. Guthrie


Archive | 1996

Method and apparatus for using a retaining ring to control the edge effect

William L. Guthrie; Tsungnan Cheng; Sen-Hou Ko; Harry Q. Lee; Michael Sherwood; Norm Shendon


Archive | 1995

Apparatus and method for distribution of slurry in a chemical mechanical polishing system

William L. Guthrie; Semyon Spektor; Ivan A. Ocanada; Norm Shendon


Archive | 2000

Method of forming a transparent window in a polishing pad

Manoocher Birang; Allan Gleason; William L. Guthrie


Archive | 1997

Formation of transparent window on polishing pad for mechanical chemical polishing device

Manoocher Birang; Allan Gleason; William L. Guthrie; グリーソン アラン; エル. ガスリー ウィリアム; ビラング マヌーシェア


Archive | 2006

Polishing Assembly With A Window

Manoocher Birang; Allan Gleason; William L. Guthrie


Archive | 2005

Polishing pad with window and method of fabricating a window in a polishing pad

Manoocher Birang; Allan Gleason; William L. Guthrie


Archive | 2005

Method of fabricating a window in a polishing pad

Manoocher Birang; Allan Gleason; William L. Guthrie


Archive | 2013

TRANSPARENT WINDOW IN A POLISHING PAD

Manoocher Birang; Allan Gleason; William L. Guthrie


Archive | 1997

Erzeugen eines durchsichtigen Fenster in einem Polierkissen für eine chemisch-mechanische Poliervorrichtung

Manoocher Birang; Allan Gleason; William L. Guthrie

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