Is this you? Create Your Porfile
Avatar

Harry Q. Lee

Applied Materials

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Harry Q. Lee is active.

Explore More

Publication

Featured researches published by Harry Q. Lee.

Archive | 2007

Substrate thickness measuring during polishing

Jeffrey Drue David; Dominic J. Benvegnu; Harry Q. Lee; Boguslaw A. Swedek; Lakshmanan Karuppiah

Archive | 2008

Using spectra to determine polishing endpoints

Harry Q. Lee; Boguslaw A. Swedek; Dominic J. Benvegnu; Jeffrey Drue David

Archive | 2010

Spectrographic monitoring of a substrate during processing using index values

Jeffrey Drue David; Dominic J. Benvegnu; Harry Q. Lee; Boguslaw A. Swedek; Lakshmanan Karuppiah

Archive | 2006

Apparatus and methods for spectrum based monitoring of chemical mechanical polishing

Dominic J. Benvegnu; Jeffrey Drue David; Bogdan Swedek; Harry Q. Lee; Lakshmanan Karuppiah

Archive | 2011

Adaptively Tracking Spectrum Features For Endpoint Detection

Jeffrey Drue David; Dominic J. Benvegnu; Boguslaw A. Swedek; Harry Q. Lee

Archive | 2009

Adjusting Polishing Rates by Using Spectrographic Monitoring of a Substrate During Processing

Jeffrey Drue David; Dominic J. Benvegnu; Harry Q. Lee; Boguslaw A. Swedek

Archive | 2008

Determining Physical Property of Substrate

Abraham Ravid; Boguslaw A. Swedek; Jeffrey Drue David; Jun Qian; Ingemar Carlsson; Dominic J. Benvegnu; Harry Q. Lee; Lakshmanan Karuppiah

Archive | 2010

Feedback for polishing rate correction in chemical mechanical polishing

Jun Qian; Charles C. Garretson; Sivakumar Dhandapani; Jeffrey Drue David; Harry Q. Lee

Archive | 2010

Endpoint method using peak location of spectra contour plots versus time

Jeffrey Drue David; Harry Q. Lee; Dominic J. Benvegnu; Boguslaw A. Swedek

Archive | 2009

USING OPTICAL METROLOGY FOR WITHIN WAFER FEED FORWARD PROCESS CONTROL

Jeffrey Drue David; Harry Q. Lee; Boguslaw A. Swedek; Dominic J. Benvegnu; Zhize Zhu; Wen-Chiang Tu

Explore More

Collaboration

Dive into the Harry Q. Lee's collaboration.

Top Co-Authors
Avatar

Jeffrey Drue David

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Dominic J. Benvegnu

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Boguslaw A. Swedek

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Jun Qian

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Lakshmanan Karuppiah

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Zhize Zhu

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Jimin Zhang

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Sivakumar Dhandapani

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Wen-Chiang Tu

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Benjamin Cherian

Applied Materials

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge