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Norm Shendon

Applied Materials

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Publication

Featured researches published by Norm Shendon.

Archive | 1995

Continuous processing system for chemical mechanical polishing

Robert D. Tolles; Norm Shendon; Sasson Somekh; Ilya Perlov; Eugene Gantvarg; Harry Q. Lee

Archive | 1996

Method and apparatus for using a retaining ring to control the edge effect

William L. Guthrie; Tsungnan Cheng; Sen-Hou Ko; Harry Q. Lee; Michael Sherwood; Norm Shendon

Archive | 1994

Chemical mechanical polishing apparatus with improved polishing control

Norm Shendon

Archive | 1995

Apparatus and method for distribution of slurry in a chemical mechanical polishing system

William L. Guthrie; Semyon Spektor; Ivan A. Ocanada; Norm Shendon

Archive | 1996

Apparatus for holding a substrate during polishing

Norm Shendon; Michael Sherwood; Henry Lee

Archive | 1993

Orbital chemical mechanical polishing apparatus and method

Norm Shendon; Dennis R. Smith

Archive | 1996

Apparatus and method for polishing substrates

Ilya Perlov; Eugene Gantvarg; Harry Q. Lee; Robert D. Tolles; Norm Shendon; Sasson Somekh

Archive | 1995

Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning

Norm Shendon; William R. Bartlett

Archive | 1998

System for chemical mechanical polishing having multiple polishing stations

Robert D. Tolles; Norm Shendon; Sasson Somekh; Ilya Perlov; Eugene Gantvarg; Harry Q. Lee

Archive | 1999

Chemical mechanical polishing apparatus with orbital polishing

Norm Shendon

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Harry Q. Lee

Applied Materials

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Eugene Gantvarg

Applied Materials

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Ilya Perlov

Applied Materials

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Robert D. Tolles

Applied Materials

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Sasson Somekh

Applied Materials

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Michael Sherwood

Applied Materials

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Henry Lee

Applied Materials

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William R. Bartlett

Applied Materials

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Semyon Spektor

Applied Materials

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William L. Guthrie

Applied Materials

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