Yasuhisa Sato
Fujitsu
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Publication
Featured researches published by Yasuhisa Sato.
international symposium on vlsi technology systems and applications | 1991
Yasuhisa Sato; Rinshi Sugino; Masaki Okuno; Nobuo Kikuchi; Jun-ichi Teramae; Akinao Ogawa; Shimpei Hijiya; Takashi Ito
The authors studied the reverse current in n/sup +/p junctions after photo-excited cleaning for samples fabricated by RIE. Silicon surfaces of a wafer contaminated during RIE were etched by photo-excited dry cleaning using chlorine, after which the unexpectedly large junction leakage current often occurring after wet cleaning alone was completely suppressed.<<ETX>>
Archive | 1996
Toshiro Nakanishi; Yasuhisa Sato; Masaki Okuno
Archive | 1996
Rinji Sugino; Masaki Okuno; Yasuhisa Sato
Archive | 1993
Toshiro Nakanishi; Yasuhisa Sato
Archive | 1989
Yasuhisa Sato; Takushi Motoyama
Archive | 1994
Masaki Okuno; Yasuhisa Sato; Shigeyuki Sugino; 泰久 佐藤; 昌樹 奥野; 林志 杉野
The Japan Society of Applied Physics | 1989
Rinshi Sugino; Ritsuo Takizawa; Yasuhisa Sato; Takashi Ito
Archive | 2012
Takao Okochi; 隆雄 大河内; Yasuhisa Sato; 泰久 佐藤; Naomi Kida; 尚美 木田
IEICE Transactions on Electronics | 1992
Rinshi Sugino; Yoshiko Okui; Masaki Okuno; Mayumi Shigeno; Yasuhisa Sato; Akira Ohsawa; Takashi Ito
The Japan Society of Applied Physics | 1990
Yasuhisa Sato; Rinshi Sugino; Masaki Okuno; Takashi Ito
