Yi Zheng | Researchain

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Featured researches published by Yi Zheng.

Archive | 2002

Method of depositing dielectric materials in damascene applications

Ju-hyung Lee; Ping Xu; Shankar Venkataraman; Li-Qun Xia; Fei Han; Ellie Yieh; Srinivas D. Nemani; Kangsub Yim; Farhad Moghadam; Ashok K. Sinha; Yi Zheng

Archive | 2007

Method and system for improving dielectric film quality for void free gap fill

Abhijit Basu Mallick; Jeffrey C. Munro; Linlin Wang; Srinivas D. Nemani; Yi Zheng; Zheng Yuan; Dimitry Lubomirsky; Ellie Yieh

Archive | 2005

Method for forming ultra low k films using electron beam

Yi Zheng; Srinivas D. Nemani; Li-Qun Xia; Eric Hollar; Kang Sub Yim

Archive | 2004

Ultra low dielectric materials based on hybrid system of linear silicon precursor and organic porogen by plasma-enhanced chemical vapor deposition (PECVD)

Kang Sub Yim; Yi Zheng; Srinivas D. Nemani; Li-Qun Xia; Eric Hollar

Archive | 2005

Multi-stage curing of low k nano-porous films

Francimar Schmitt; Yi Zheng; Kang Sub Yim; Sang H. Ahn; Lester A. D'Cruz; Dustin W. Ho; Alexandros T. Demos; Li-Qun Xia; Hichem M'Saad

Archive | 2005

Method for cleaning a process chamber

Yi Zheng; Vinita Singh; Srinivas D. Nemani; Chen-An Chen; Ju-hyung Lee; Shankar Venkataraman

Archive | 2002

Two-layer film for next generation damascene barrier application with good oxidation resistance

Yi Zheng; Srinivas D. Nemani; Li-Qun Xia

Archive | 2002

Use of cyclic siloxanes for hardness improvement of low k dielectric films

Vinita Singh; Srinivas D. Nemani; Yi Zheng; Lihua Li; Tzu-Fang Huang; Li-Qun Xia; Ellie Yieh

Archive | 2006

Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers

Kang Sub Yim; Kelvin Chan; Nagarajan Rajagopalan; Josephine Ju-Hwei Chang Liu; Sang H. Ahn; Yi Zheng; Sang In Yi; Vu Ngoc Tran Nguyen; Alexandros T. Demos

Archive | 2003

Reacting an organosilicon compound with an oxidizing gas to form an ultra low k dielectric

Lihua Li; Wen H. Zhu; Tzu-Fang Huang; Li-Qun Xia; Ellie Yieh; Son Van Nguyen; Lester A. D'Cruz; Troy Kim; Dian Sugiarto; Peter Wai-Man Lee; Hichem M'Saad; Melissa M. Tam; Yi Zheng; Srinivas D. Nemani

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