Yoshikiyo Yui | Researchain

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Publication

Featured researches published by Yoshikiyo Yui.

Archive | 1990

Exposure control system

Yuji Tsuruoka; Yoshikiyo Yui

Archive | 2000

Transfer apparatus and transfer method

Yoshikiyo Yui; Masato Muraki

Archive | 2000

Correcting method for correcting exposure data used for a charged particle beam exposure system

Masato Muraki; Yoshikiyo Yui

Archive | 2002

Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same

Hiroya Ohta; Yasunari Sohda; Norio Saitou; Haruo Yoda; Yoshikiyo Yui; Shin apos Ichi Hashimoto

Archive | 1990

Exposure control method and apparatus compensating for detection of offset from a measured value

Yoshikiyo Yui; Yuji Tsuruoka

Archive | 2000

Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method

Masato Muraki; Yoshikiyo Yui

Archive | 2005

Multi-electron beam exposure method and apparatus

Haruo Yoda; Yasunari Souda; Hiroya Ohta; Yoshikiyo Yui; Shinichi Hashimoto

Archive | 2000

Control system for a charged particle exposure apparatus

Yoshikiyo Yui; Masato Muraki

Archive | 2000

Charged-particle beam exposure apparatus and device manufacturing method using the same

Yoshikiyo Yui; Masato Muraki

Archive | 2000

Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this method

Masato Muraki; Yoshikiyo Yui

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Collaboration

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Masato Muraki

Canon Inc.

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Haruo Yoda

Hitachi

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Hiroya Ohta

Canon Inc.

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Shinichi Hashimoto

Canon Inc.

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Yuji Tsuruoka

Canon Inc.

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Akira Miyake

Canon Inc.

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Haruhito Ono

Canon Inc.

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Hideo Hata

Canon Inc.

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Kazuyuki Oda

Canon Inc.

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Kentaro Sano

Canon Inc.

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