Yuka Terai
Panasonic
Network
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Publication
Featured researches published by Yuka Terai.
The Japan Society of Applied Physics | 1992
Kousaku Yano; Yuka Terai; Sin-ichi Imai; Tetsuya Ueda; Satoshi Ueda; Masayuki Endoh; Noboru Nomura
Simple su rf ace control by silylation (SCS) process is developed for suppression of precipitation in high impurity concentrations BPSG films. Increase in impurity concentrations causes a precipitation problem by moisture penetration. This process employs exposure to the vaporized hexamethyldisilazane or that spin coating after BPSG films deposition. Silylation then occurs at the BPSG su rface. Silyl radicals change BPSG surface from a hydrophilic to a hydrophobic one.
Archive | 1999
Yuichiro Yamada; Naoki Suzuki; Ryuzo Houchin; Noboru Nomura; Kousaku Yano; Yuka Terai
Archive | 1993
Kousaku Yano; Masayuki Endo; Yuka Terai; Noboru Nomura; Tomoyasu Murakami; Tetsuya Ueda; Satoshi Ueda
Archive | 1994
Shin-ichi Imai; Yuka Terai; M. Fukumoto; Kousaku Yano; Hiroyuki Umimoto; Shinji Odanaka; Yasuo Mizuno
Archive | 1993
Shuji Hirao; Hisashi Ogawa; Yuka Terai; Mitsuru Sekiguchi; M. Fukumoto; Isao Miyanaga
Archive | 1991
Takatoshi Yasui; Chiaki Kudo; Ichiro Nakao; Toyokazu Fujii; Yuka Terai; Shin-ichi Imai; Hiroshi Yamamoto; Yasushi Naito
Archive | 2013
Yuka Terai; Atsuo Nakagawa
Archive | 1998
Akemi Kawaguchi; Yuka Terai; Kousaku Yano
Archive | 2005
Yuka Terai; Kyoji Yamashita
Archive | 1996
Akemi Kawaguchi; Yuka Terai; Kousaka Yano
