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Martin E. Lee

Nikon

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Publication

Featured researches published by Martin E. Lee.

Archive | 1995

WINDOW FRAME-GUIDED STAGE MECHANISM

Martin E. Lee

Archive | 2005

Projection optical device and exposure apparatus

Akimitsu Ebihara; Martin E. Lee; Bausan Yuan

Archive | 1999

Lithography apparatus with movable stage and mechanical isolation of stage drive

Martin E. Lee

Archive | 1999

Double flexure support for stage drive coil

Martin E. Lee

Archive | 2001

Method for making apparatus with dynamic support structure isolation and exposure method

Martin E. Lee

Archive | 1999

Exposure apparatus having dynamically isolated reaction frame

Martin E. Lee

Archive | 1999

Exposure apparatus having reaction frame

Martin E. Lee

Archive | 2003

Method of making exposure apparatus with dynamically isolated reaction frame

Martin E. Lee

Archive | 1999

Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame

Martin E. Lee

Archive | 1999

Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device

Martin E. Lee

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Bausan Yuan

Nikon

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Michael R. Sogard

Nikon

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Akimitsu Ebihara

Nikon

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Andrew J. Hazelton

Nikon

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Mike Binnard

Nikon

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John H. McCoy

Nikon

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Kazuya Ono

Nikon

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Michael B. Binnard

Nikon

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W. Thomas Novak

Nikon

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Douglas C. Watson

Philips

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