Martin E. Lee

WINDOW FRAME-GUIDED STAGE MECHANISM

Projection optical device and exposure apparatus

Lithography apparatus with movable stage and mechanical isolation of stage drive

Double flexure support for stage drive coil

Method for making apparatus with dynamic support structure isolation and exposure method

Exposure apparatus having dynamically isolated reaction frame

Exposure apparatus having reaction frame

Method of making exposure apparatus with dynamically isolated reaction frame

Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame

Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device