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Thomas Brezoczky

Applied Materials

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Publication

Featured researches published by Thomas Brezoczky.

Archive | 1999

Shield to prevent cryopump charcoal array from shedding during cryo-regeneration

Thomas Brezoczky; Murali Narasimhan

Archive | 2010

Multiple zone carrier head with flexible membrane

Hung Chih Chen; Jeonghoon Oh; Tsz-Sin Siu; Thomas Brezoczky; Steven M. Zuniga

Archive | 2002

Pedestal assembly with enhanced thermal conductivity

Cheng-Hsiung Tsai; Karl M. Brown; Thomas Brezoczky

Archive | 2005

CARRIER HEAD WITH MULTIPLE CHAMBERS

Steven M. Zuniga; Hung Chih Chen; Thomas Brezoczky; Steven T. Mear

Archive | 2007

Composite retaining ring

Jeonghoon Oh; Hung Chih Chen; Thomas Brezoczky; Douglas R. Mcallister; David Datong Huo

Archive | 1999

In-situ getter in process cavity of processing chamber

Thomas Brezoczky; Roger Heyder; Robert E. Davenport

Archive | 2014

PAD CONDITIONING PROCESS CONTROL USING LASER CONDITIONING

Rajeev Bajaj; Rixin Peng; Mario Cornejo; Thomas Brezoczky; Fred C. Redeker; Thomas H. Osterheld

Archive | 2001

Method and apparatus for shielding a device from a semiconductor wafer process chamber

Thomas Brezoczky; Randy Schmieding; Gene Y. Kohara

Archive | 2008

Apparatus and methods for retaining a plurality of elongated photovoltaic modules

Andrew J. Nagengast; Thomas Brezoczky

Archive | 2013

MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE

Jeonghoon Oh; Tsz-Sin Siu; Hung Chih Chen; Andrew J. Nagengast; Steven M. Zuniga; Thomas Brezoczky

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Collaboration

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Andrew J. Nagengast

Applied Materials

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Hung Chih Chen

Applied Materials

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Anantha K. Subramani

Applied Materials

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Christopher A. Rowland

Applied Materials

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Hou T. Ng

Applied Materials

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Jennifer Y. Sun

Applied Materials

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Jeonghoon Oh

Applied Materials

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Kartik Ramaswamy

Applied Materials

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Kasiraman Krishnan

Applied Materials

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Simon Yavelberg

Applied Materials

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