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Annette Saenger

Infineon Technologies

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Publication

Featured researches published by Annette Saenger.

Archive | 2003

Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes

Annette Saenger; Bernhard Sell; Harald Seidl; Thomas Hecht; Martin Gutsche

Archive | 2007

Selective deposition method

Tim Boescke; Annette Saenger; Stefan Jakschik; Christian Fachmann; Matthias Patz; Alejandro Avellan; Thomas Hecht; Jonas Sundqvist

Archive | 2001

Polishing liquid and process of structuring metals and metal oxides

Gerhard Beitel; Annette Saenger; Baerbel Seebacher

Archive | 2001

Abrasive slurry and process for a chemical-mechanical polishing of a precious-metal surface

Gerhard Beitel; Eugen Unger; Annette Saenger

Archive | 2001

Memory cell arrangement and method for the production thereof

Stefan Miethaner; Siegfried Schwarzl; Annette Saenger

Archive | 2001

Method for chemical-mechanical polishing of a layer which is a substrate and is a metal selected from a platinum group

Gerhard Beitel; Annette Saenger; Gerd Mainka; Rainer Florian Schnabel

Archive | 2001

Production of thin praseodymium oxide film as dielectric in electronic element of semiconductor device, e.g. deep trench capacitor or FET gate dielectric, involves depositing reactive praseodymium and oxygen compounds from gas phase

Annette Saenger; Martin Dr. Gutsche; Harald Seidl; Bernhard Sell

Archive | 2002

Fabrication of low-resistance electrodes in a deep trench using electrochemical methods

Annette Saenger; Bernhard Sell; Albert Birner; Matthias Goldbach

Archive | 2001

Process for the deposition of thin layers by chemical vapor deposition

Annette Saenger

Archive | 2001

Memory cell arrangement and method of fabricating it

Stefan Miethaner; Siegfried Schwarzl; Annette Saenger

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Collaboration

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Bernhard Sell

Siemens

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Harald Seidl

Infineon Technologies

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Gerhard Beitel

Infineon Technologies

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Thomas Hecht

Infineon Technologies

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Martin Gutsche

Infineon Technologies

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Albert Birner

Infineon Technologies

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Stephan Kudelka

Qimonda

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Bernhard Sell

Siemens

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Goetz Springer

Infineon Technologies

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Matthias Goldbach

Infineon Technologies

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