Annette Saenger

Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes

Selective deposition method

Polishing liquid and process of structuring metals and metal oxides

Abrasive slurry and process for a chemical-mechanical polishing of a precious-metal surface

Memory cell arrangement and method for the production thereof

Method for chemical-mechanical polishing of a layer which is a substrate and is a metal selected from a platinum group

Production of thin praseodymium oxide film as dielectric in electronic element of semiconductor device, e.g. deep trench capacitor or FET gate dielectric, involves depositing reactive praseodymium and oxygen compounds from gas phase

Fabrication of low-resistance electrodes in a deep trench using electrochemical methods

Process for the deposition of thin layers by chemical vapor deposition

Memory cell arrangement and method of fabricating it